Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: OX
Tool config is based on original PO, please verify tool details at tool inspection
Software Revision B2.8_79
FI Software FB4.70_12
GEM Software 7.20_17
Wafer Size Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Online Connection GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
Inter Face 3 carrier stage (Continuous flow operation) w/ 3 Loadports
Interface A Hardware related to EDA
Corrosion Resistant FI & SWLL N/A
Loader Mod Corrosion Prevent N/A
Standard SWLL Standard SWLL
Side Storage Pod Side Storage Pod
OCR KIT, YAT BACKSIDE OCR, 300MM 5.3FI
Transfer Pressure Monitor 10 Torr Manometer and 1SLM N2 APC, kit
Transfer Pressure Monitor GAUGE VAC MINI-CONVECTRON
Load Lock Pressure Monitor GAUGE VAC MINI-CONV
Transfer Chamber Blade Kit
LL ISO-Slit Valve Grp Elast. AP Chemrez 513 Elastomer
Atmospheric Robot KAWASAKI A3
Mainframe Robot VXP with Dual blade
Wafer Pass Through Not available
Loadport type Enhanced 25 wafer FOUP
Loadports Loadport System
Open Cassettes Supported N/A
Water Leak Detector Configured
EMO Type Turn to Release (Front x3, Rear x4) - 3 on FI
1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.
System Monitors Monitor #1 is Flat Panel with Keyboard on stand
Monitor #2 is through the wall flat panel (optional)
Cable Length RF Cable : 2 cables 75 ft; 1Short Cable 2 cables/chamber are 75'
1 cable is short (within chamber)
Cable Length Monitor Cable : 25 Ft 16ft effective
Cable Length Pump Cable Length : 75 ft interface cable
Signal Tower Red/Yellow/Green/Blue
( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER
4 LIGHT COVER (RAGB) W/ CLR DAUG
Inter Lock
Etch Common AC Rack Lean AC Rack
Chiller (wall/source) "NX20A(ZT150 coolant)
0190-17815" NOTE: Coolant not shipped with tool.
Chiller (Dual Zone Cathode) NX20A (ZT130 coolant)
Coolant "Galden ZT-130 for Cathode
Galden ZT-150 for Wall/Source
Galden FC-3283 for Cathode/Wall/Source
Chiller Hose Length 75' Dual Channel Chiller (U.S. sites use 50'
RF Gen TOP (162Mhz Source) 3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY
208VAC, WATER COOLED (0190-29389) Option 10
RF Gen #1 Bottom (13Mhz Bias) "RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT)
0190-15319"
RF Gen #2 Bottom (2 Mhz Bias) "RF GEN PLASMA 9KW 2MHZ ENI)
0190-29586"
RF Match "Y
(0190-25187)"
IPUP Type Alcatel A100L (0190-01042)
Process Chb.1,2,3,&4 (IAEF) Enabler (Front End-E5)
Endpoint type (Eye-D) Endpoint type (Eye-D)(0246-00196)
Plasma State Monitor Plasma State Monitor (1 per system) (0190-17948)
Spectrograph EyeD HP Spectrograph (0190-28658)
ESC type (Dual Zone) ESC type (Dual Zone) (0010-33416)
Cathode Base Non-Anodized (0041-05779)
Cathode N2 Purge Cathode N2 Purge - Yes
L-collar Si Insert Ring L-collar Single Crystal Si Insert Ring 1.5mm step
TMP Shimadzu D3403M, 3000 liter
TMP Back Pressure Monitor 51A11TGA2BA003 (MKS) Foreline Transducer
Wfib Y(Wfib - Mod (Restriction at RTN))
APC VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSOR
Slit Valves Anodized (AL) 513 Chemrez
Pressure Monitor 1,000 mt Head
Pressure Monitor 100 mt Head
Pressure Monitor Transducer 100 Torr Cal Tank
Pressure Monitor Chamber ATM Switch : 51A13TGA2AA720 (MKS)
Pressure Monitor Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas
Switch flow through 600Torr
Chamber Controller Module SBC C400MHZ, 3U CPCI, 256MB RAM
FES Server FES Server
NSR# 621632-0 Enabler Chamber FRCII, ratio 1000/1000 FRCII
Throttle Gate Valve (TGV) Throttle Gate Valve (TGV) - Ceramic
Gas Line 1 Gas line 1- C4F6 100 sccm UNIT IFC-125
Gas Line 2 Gas line 2- CH2F2 100 sccm UNIT IFC-125
Gas Line 3 Gas line 3- C3F8 50 sccm UNIT IFC-125
Gas Line 4 Gas line 4- O2_M 300 sccm UNIT-125
Gas Line 5 Gas line 5- SO2 200 sccm UNIT IFC-125
Gas Line 6 Gas line 6- CF4 200 sccm UNIT IFC-125
Gas Line 7 Gas line 7 - C4F6_IGI 5 sccm UNIT-125
Gas Line 8 Gas line 8 - O2_IGI 5 sccm UNIT-125
Gas Line 9 Gas line 9- O2_L 50 sccm UNIT-125
Gas Line 10 Gas line 10- O2_H 5000 sccm UNIT-125
Gas Line 11 Gas line 11- Ar 2000 sccm UNIT-125
Gas Line 12 Gas line 12- N2 200 sccm UNIT-125
Gas Line 13 Gas line 13- CHF3 200 sccm UNIT-125
Gas Line 14 Gas line 14- C4F8 100 sccm UNIT-125
Gas Pallet Type NextGen
Gas Pallet ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GEN
Regulators Regulator on SLD (Inlet to Gas Panel, 1 per unique gas, 12 max, VCR connection)
Includes independent O2 line
Valves CKD
Transducers Transducers inside MFC's
Flow Ratio Controller (NSTU) Flow Ratio Controller (NTSU) Located in gas panel.
IGI Interlock N/A Can flow two at a time.
Filters MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)
Gas Leak Detection Port External Connection Point
Gas Panel Exhaust Top Exhaust
Gas Panel Facilities Hook Up Single Line Drop
Piping Standard high purity stainless & Exhaust through Gas box
Final Pressure Switch At 600 Torr coming from gas pallet,
At chambers switch pressure signal 10 torr half atmosphere
Purge N2 (Process Grade N2)
Missing/Damaged Parts List:
Dry pumps are not included with sales
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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