Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 4/29/2022

Process: OX

Tool config is based on original PO, please verify tool details at tool inspection

Software Revision   B2.8_79   

FI Software   FB4.70_12   

GEM Software   7.20_17   

Wafer Size   Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch   

Online Connection   GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)   

Inter Face   3 carrier stage (Continuous flow operation) w/ 3 Loadports   

Interface A   Hardware related to EDA  

Corrosion Resistant FI & SWLL   N/A   

Loader Mod Corrosion Prevent   N/A   

Standard SWLL   Standard SWLL   

Side Storage Pod   Side Storage Pod

OCR   KIT, YAT BACKSIDE OCR, 300MM 5.3FI   

Transfer Pressure Monitor   10 Torr Manometer and 1SLM N2 APC, kit   

Transfer Pressure Monitor   GAUGE VAC MINI-CONVECTRON 

Load Lock Pressure Monitor   GAUGE VAC MINI-CONV   

Transfer Chamber Blade Kit 

LL ISO-Slit Valve Grp Elast.   AP Chemrez 513 Elastomer   

Atmospheric Robot   KAWASAKI A3   

Mainframe Robot   VXP with Dual blade   

Wafer Pass Through   Not available   

Loadport type   Enhanced 25 wafer FOUP   

Loadports   Loadport System   

Open Cassettes Supported   N/A   

Water Leak Detector   Configured   

EMO Type   Turn to Release (Front x3, Rear x4) - 3 on FI

1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.   

System Monitors   Monitor #1 is Flat Panel with Keyboard on stand

Monitor #2 is through the wall flat panel (optional)   

Cable Length   RF Cable : 2 cables 75 ft; 1Short Cable   2 cables/chamber are 75'

1 cable is short (within chamber)

Cable Length   Monitor Cable : 25 Ft 16ft effective   

Cable Length   Pump Cable Length : 75 ft interface cable   

Signal Tower   Red/Yellow/Green/Blue

( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER

4 LIGHT COVER (RAGB) W/ CLR DAUG   

Inter Lock   

Etch Common AC Rack   Lean AC Rack   

Chiller (wall/source)   "NX20A(ZT150 coolant)

0190-17815"   NOTE: Coolant not shipped with tool.

Chiller (Dual Zone Cathode)   NX20A (ZT130 coolant)  

Coolant   "Galden ZT-130 for Cathode

Galden ZT-150 for Wall/Source

Galden FC-3283 for Cathode/Wall/Source

Chiller Hose Length   75'   Dual Channel Chiller (U.S. sites use 50'

RF Gen TOP (162Mhz Source)   3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY

208VAC, WATER COOLED (0190-29389)   Option 10

RF Gen #1 Bottom (13Mhz Bias)   "RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT)

0190-15319"   

RF Gen #2 Bottom (2 Mhz Bias)   "RF GEN PLASMA 9KW 2MHZ ENI)

0190-29586"   

RF Match   "Y

(0190-25187)"   

IPUP Type   Alcatel A100L (0190-01042)   

Process Chb.1,2,3,&4   (IAEF) Enabler (Front End-E5)   

Endpoint type (Eye-D)   Endpoint type (Eye-D)(0246-00196)   

Plasma State Monitor   Plasma State Monitor (1 per system) (0190-17948)   

Spectrograph   EyeD HP Spectrograph (0190-28658)   

ESC type (Dual Zone)   ESC type (Dual Zone) (0010-33416)   

Cathode Base   Non-Anodized (0041-05779)  

Cathode N2 Purge   Cathode N2 Purge - Yes   

L-collar Si Insert Ring   L-collar Single Crystal Si Insert Ring 1.5mm step   

TMP   Shimadzu D3403M, 3000 liter 

TMP Back Pressure Monitor   51A11TGA2BA003 (MKS) Foreline Transducer   

Wfib   Y(Wfib - Mod (Restriction at RTN))   

APC   VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSOR   

Slit Valves   Anodized (AL) 513 Chemrez   

Pressure Monitor   1,000 mt Head   

Pressure Monitor   100 mt Head   

Pressure Monitor   Transducer 100 Torr Cal Tank   

Pressure Monitor   Chamber ATM Switch : 51A13TGA2AA720 (MKS)   

Pressure Monitor   Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas

Switch flow through 600Torr   

Chamber Controller Module   SBC C400MHZ, 3U CPCI, 256MB RAM   

FES Server   FES Server   

NSR# 621632-0   Enabler Chamber FRCII, ratio 1000/1000   FRCII

Throttle Gate Valve (TGV)   Throttle Gate Valve (TGV) - Ceramic   

Gas Line 1   Gas line 1- C4F6 100 sccm UNIT IFC-125   

Gas Line 2   Gas line 2- CH2F2 100 sccm UNIT IFC-125   

Gas Line 3   Gas line 3- C3F8 50 sccm UNIT IFC-125   

Gas Line 4   Gas line 4- O2_M 300 sccm UNIT-125   

Gas Line 5   Gas line 5- SO2 200 sccm UNIT IFC-125   

Gas Line 6   Gas line 6- CF4 200 sccm UNIT IFC-125   

Gas Line 7   Gas line 7 - C4F6_IGI 5 sccm UNIT-125   

Gas Line 8   Gas line 8 - O2_IGI 5 sccm UNIT-125   

Gas Line 9   Gas line 9- O2_L 50 sccm UNIT-125   

Gas Line 10   Gas line 10- O2_H 5000 sccm UNIT-125   

Gas Line 11   Gas line 11- Ar 2000 sccm UNIT-125   

Gas Line 12   Gas line 12- N2 200 sccm UNIT-125   

Gas Line 13   Gas line 13- CHF3 200 sccm UNIT-125   

Gas Line 14   Gas line 14- C4F8 100 sccm UNIT-125   

Gas Pallet Type   NextGen   

Gas Pallet   ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GEN   

Regulators   Regulator on SLD (Inlet to Gas Panel, 1 per unique gas, 12 max, VCR connection)  

 Includes independent O2 line

Valves   CKD   

Transducers   Transducers inside MFC's   

Flow Ratio Controller (NSTU)   Flow Ratio Controller (NTSU)   Located in gas panel.

IGI Interlock   N/A   Can flow two at a time.

Filters   MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)   

Gas Leak Detection Port   External Connection Point   

Gas Panel Exhaust   Top Exhaust   

Gas Panel Facilities Hook Up   Single Line Drop   

Piping   Standard high purity stainless & Exhaust through Gas box   

Final Pressure Switch   At 600 Torr coming from gas pallet,

At chambers switch pressure signal 10 torr half atmosphere   

Purge   N2 (Process Grade N2)   

Missing/Damaged Parts List:

Dry pumps are not included with sales

Please inspect tool to reconfirm