Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Tokyo Electron Ltd. (TEL) Telius 305 SCCM

Asset ID: 10209

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Tokyo Electron Ltd. (TEL)

Telius 305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: Jun 11, 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Software Version (include revision #) Ver6.75-Rev000-VSTD6.75a  
System Power Rating  200V AC 3-Phase  
Loading Configuration  3 lots loading  
   Vendor Chm ModelChemicals / Gases Used 
Chm/Unit Position   1  SCCMAr ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO
Chm/Unit Position   2  SCCMAr ,O2 ,CF4 ,CHF3 ,CH2F2 ,C4F6 ,C4F8 ,CO
Chm/Unit Position   3  _________________________________________________________
Chm/Unit Position   4  _________________________________________________________
Process Unit:  Model:Remark 
Chiller  Daikin UBRPD5B-2T2
* stopped production
Coolant  Lower:FC3283, Upper:FC40  
Proc Chbr 1,2  SCCM Oxide; Y203 Coating  
ESC type  ESC ASSY,SCCM-OX LES3D87-052854-11
RF Generator TOP  AGA-50B2  
RF Matcher TOP  AMN-50B2  
RF Generator Bottom  WGA-50E  
Matching Controller  WMN-50H6(2MHZ/5KW)(PS3)  
MFC/Pressure Unit:     
Pressure Monitor  C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa 
Pressure Monitor  C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa 
Pressure Monitor  B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor  ATM Switch : 41B13DGA2AA040 (MKS)  
Pressure Monitor  Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas 
Drive Mechanisms:     
FOUP Opener:     
Loader Module  SELME2112ZS22-AD5  
LOAD PORT  SELOP12F25-30U-14  
DRIVE UNIT  SBX92102928  
Carrier ID Reader  KEYENCE BL-601 HAC1-SO  
Gas System:     
Final Pressure Switch  51A (MKS)  
Valve  Primary side(Utility-MFC):Mega mini (FUJIKIN)  
Valve  Secondary side(MFC-PC):Mega one (FUJIKIN)  
FCS  FCSDN-4WS-798  
Exhuast System:     
TMP  FT-3301
TMP Back Pressure Monitor  51A11TGA2BA003 (MKS)  
Dry Pump  MU300(KASHIYAMA) Customer Supply  
Final Valve,  Heater  Valve; AGD21V-6RM-GWL4 (CKD)  
Filter  Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)  
APC  10 INCH (250MM)  
EMO  Front x1, Rear x3  
Signal Tower  Red/Yellow/Green/ (Upper Left of Front x1 & Upper right section of loader on maintenance side x1)
Cable Length  12m (Interconnection), 16m (Top RF cables),15m(Btm RF cables) 
Coolant  Lower:FC3283, Upper:FC40  

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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