Equipment details:
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 9/1/2023
Process: CUCMP
Base System
Reflexion LK: 4 head, 3 platen polishing system. Dry in Dry out.
Polisher Skins : Dark P1, P2, P3, and P4: 4910 compliant.
Gap Wash: 120 degree nozzles
Load Cup Wafer Exchanger: Enhanced counter balance springs
Nova 3090 Ready: None
Monitor 1 Location : Cart
Monitor 2 Location : Ergo Arm type
Light Tower: Factory Interface and Polisher Sides
Software
LK Software: lp3B4.5_29
Factory Interface : fb4.9_14 Beta
ISRM / RTPC: isB3.0_10
RTPC: B3.0_11
Platen 1
Platen Type : STANDARD (<= 200 RPM)
Endpoint : RTPC
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195 (4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Control: P laten Cooling Water
Platen 2
Platen Type : STANDARD (<= 200 RPM)
Endpoint : Full Scan Optical ISRM
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min)F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Control: P laten Cooling Water
Platen 3
Platen Type: STANDARD (<= 200 RPM)
Endpoint : Full Scan Optical ISRM
Endpoint: N/A
High Pressure Rinse Flow Meter : 1350-00195(4.6 l/min) F LOW METER ASSY 1/2OD 1.6-20LPM PFA
Rinse Arms: High Pressure/Flow
Flow Meter : 50-500 ml/min
Temperature Contro: l Platen Cooling Water
Polisher
Polisher Technology : SLURRY AND PAD
Polishing Head: CONTOUR GEN III (0.5 TO 5.0 PSI)
Cross Break: N/A
Pad Wafer Loss Sensor: DARK PAD SENSOR
InterPlaten Clean : No
ISRM Laser Key Switch: Y es
Slurry Delivery System : 4 x 12 CLC SDS
Head 1 Power Cable : 0150-16277 CABLE ASSY, HR1, DRIVER-MOTOR POWER, REF
Head 2 Power Cable : 0150-16278 CABLE ASSY, HR2, DRIVER-MOTOR POWER, REF
Head 3 Power Cable : 0150-16279 CABLE ASSY, HR3, DRIVER-MOTOR POWER, REF
Head 4 Power Cable : 0150-16280 CABLE ASSY, HR4, DRIVER-MOTOR POWER, REF
Head 1 Encoder Cable: 0150-16281C ABLE ASSY, 300MM, HR1, DRIVER-RESOLVER
Head 2 Encoder Cable: 0150-16282C ABLE ASSY, 300MM, HR2, DRIVER-RESOLVER
Head 3 Encoder Cable: 0150-16283C ABLE ASSY, 300MM, HR3, DRIVER-RESOLVER
Head 4 Encoder Cable: 0150-16284C ABLE ASSY, 300MM, HR4, DRIVER-RESOLVER
G4+ UPA : MKS UPA
G4+ UPA : SMC UPA
Cleaner Meg
Chemical 1:C LC 1-250 ml/min
Chemical 2:C LC 1-250 ml/min
Brush Box 1
Chemical 1 : 0-1250ml/min
Chemical 2 : 0-1250ml/min
Brush box 2
Brush LDM Type: TwoChemInLineMixed
Chemical 1 : 0-1250ml/min
Chemical 2 : 0-1250ml/min
Dryer Module
Dryer Type :VAPOR DRYER
Recovery Module: N /A
Output Station Dampner: Cap is Viton
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
