Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Abatement - Exhaust Management System
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Total Qty: 2
|Brand||Module||S/N||Tool / Location||Asset No.|
The Hot Oxidation System (HOx) offers a significant advance in the performance of non-fuel oxidation technology. Targeted at CVD applications, the system ensures safe removal of pyrophoric gases to below flammable limits and the effective treatment of acidic by-products to prevent exhaust duct corrosion.
The HOx combines an innovative electrical heated oxidation unit with the proven three-stage wet scrubber from the inward-fired combustor product range to deliver excellent powder handling capabilities.
Ideal for most CVD applications including:
|Process gas inlets||NW40 SS, 4 inlets|
|Exhaust outlet||75mm flexible bellows|
|Nitrogen inlet||1/4" Swagelok ®|
|Stainless steel 4-6 bar gauge|
|Water||3/4" bore PVC Pipe|
|PCW||3/4" bore PVC Pipe|
|(water recirculation unit)|
|Supply||Three phase 415/380v, 50Hz|
|Or||Three phase 208v, 50/60Hz|
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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