Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Novellus Systems Inc. Concept Three Altus Max

Asset ID: 208485

Print spec sheet

Novellus Systems Inc.

Concept Three Altus Max

WCVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2017

Currently Configured for: 300mm

Current Equipment Status: Incoming

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: 1/1/2022

Vendor Tool Serial #1000269-17-22-0013 
Date of Tool Move-In13-Sep-17 
OEMNovellus 
Tool ModelDirectFill WN Max 
ProcessWNx 
Software Version7.1B5P3 
System Power Rating 208 AC 3-Phase 60 Hz 
Loading Configuration2 Load Ports 
 DescriptionChemicals / Gases Used
Chm Position   1WN Module 1Ar, NF3, WF6, NH3, B2H6
Chm Position   2WN Module 2Ar, NF3, WF6, NH3, B2H6
Chm Position   3Pre Clean Max Module 1Ar, N2, H2
Chm Position   4Pre Clean Max Module 2Ar, N2, H2


Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.