Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 1/14/2022
| OEM | LAM Research | ||
| Tool Model | 2300CORO | ||
| Process | Clean(Plasma Bevel Etcher) | ||
| Software Version (include revision #) | Ver.1.8.4 | ||
| System Power Rating | 200 AC 3-Phase for System | ||
| Loading Configuration | 3 Load Port | ||
| Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc) | |||||||
| Part Type | Part Description : | Part number: | Date of Change: | Qty | Remark | ||
| PM2 Gap driver | 685-083999-002 | Nov-20 | 1 | PM1/3 isn't exchange. | |||
| PM2 Gap stepping motor | 676-052057-012 | Nov-20 | 1 | PM1/3 isn't exchange. | |||
| Connect Cable | driver~stepping motor | 853-052857-083 | Nov-20 | 1 | PM1/3 isn't exchange. | ||
| mounting plate | used to drive | 714-A00346-001 | Nov-20 | 1 | PM1/3 isn't exchange. | ||
| Connect Cable | mother borad~driver | 853-348904-002 | Nov-20 | 1 | PM1/3 isn't exchange. | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | Clean(Plasma Bevel Etcher) | N2/O2/Ar/CF4/SF6 | |||
| Chm/Unit Position 2 | Clean(Plasma Bevel Etcher) | N2/O2/Ar/CF4/SF6 | |||
| Chm/Unit Position 3 | Clean(Plasma Bevel Etcher) | N2/O2/Ar/CF4/SF6 | |||
| Description | LP, ATM, VTM, AL, PM1/2/3, RPDB | Qty | ||||
| Tool: | WLAMK6VD00 | |||||
| Process Unit: | PM1/2/3 | Model:2300CORO | Remark | |||
| Controller: | NA | |||||
| MFC/Pressure Unit: | STEC SEC-Z313[N2(200), O2(1000), CF4(200), Ar(500), SF6(200)] | |||||
| Drive Mechanisms: | Brooks製ATM robot / Brooks製MagnaTran7 | |||||
| FOUP Opener: | Brooks製Load Port | |||||
| Gas System: | Onborad gas line | |||||
| Exhuast System: | NA | |||||
| *All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm) | ||||||
| Process Modules | 3 | |||||
| Load Port | 3 | |||||
| ATM | 1 | |||||
| VTM | 1 | |||||
| RPDB | 1 | |||||
Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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