Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) ALPHA-303i Nitride

Asset ID: 79175

Print spec sheet

Tokyo Electron Ltd. (TEL)

ALPHA-303i Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: OXYNIT

 

Tool config is based on original PO, please verify tool details at tool inspection

 

Safety Specification S2-0200/ CE-Mark(STD)

Heater Model FTP VOS-56-003 4Zone / RT-1000(C ) /with RCU

Process Condition LP

Maximum Operating Temperature C 950

ART Control N/A

N2 Load Lock YES

Wafer Type 300mm-Si SEMI STD-Notch

Qty. of Production Wafers 100

Boat Operation (Handing Position) 2 Boat Type

Software Version (WAVES) Ver 2.13 (WAVES)

 

Dewpoint Meter for N2 Load Lock None

RCU Duct Length FNC - RCU N/A

Ionizer Maker / Model ION system / 4052e(controller):4610TF(ionizer)

Chemical Per-filter (for Acid) None

Chemical Per-filter (for Alkali) None

Chemical Per-filter (for Hydrocarbon) None

Side Maintenance None

O2 Density control for N2 Load Lock Yes

N2 Boat Shower Wafer Cooling Yes

Fumace Temperature Controller Model560A

 

Carrier Type FOUP/25slots SEMI STD

FOUP Maker / Model ASYST/GEN3

Carrier Stage Capacity 16

Info Pad A,B None

Info Pad C,D None

Fork Material 1+4/ AI2O3(STD)

W/T Type 1+4 Edge Grip

W/T Auto Teaching No

 

Furnace Exhaust Connection Point Top Connection

Cooling Water Connection Point Bottom Connection

RCU Duct Connection Point N/A

 

IGS Type IGS 1.5"W-seal rail-mount

IGS Maker Fujikin

Tubing Bends Bend (STD)

IGS Final Filter MYKROLIS(Ni)

IGS Regulator VERIFLO

IGS MFC Maker / Type AERA

IGS Press. Transducer NAGANO

Incoming Gas Connection Point Bottom Connection

Gas Vent Connection Point Bottom Connection

Exhaust Vent Connection Point Top Connection

Gas Unit Exh. Connection point Bottom Connection

Process Gas Exhaust connection point Bottom Connection

 

Vacuum Gage - Press Ctrl MYKROLIS

Vacuum Gage - Press Monitor (133kPa) MYKROLIS

Vacuum Gage - Pump Monitor MYKROLIS

Main Valve CKD Combination valve

Pump Maker / Model EDWARDS/IH1800 (30000L/min)

Pump Provided by Customer

Abatement System Type Buming Type

Abatement System Maker / Model OSC 1862WA (thermal wet)

Abatement System Provided by Customer

N2 Dilution Unit Provided by Gas cabinet exhaust

Pump Power Facility provide

Pump Control Unit Steeing Location

Pump-FNC Vacuum Piping Provided By Customer

 

Exhaust Pressure Control for AP Process N/A

Exhaust Pressure Control for AP Process Maker / Model N/A

Vacuum Exhaust System New Type

Trap Piping Trap

Vacuum Pressure Controller CKD-VEC

Burn Out Unit N/A

Condenser N/A

Outer/Inner Tube Material (LP) Ouartz / Quartz

Inner Tube Type (LP) Reduce

Inner T/C Outer Tube interior wall type (for CVD)

Tube Sealing O-Ring

Manifold Heater None

Switch Valve for Manifold Cooling Water The reinforced cooling water is used

Soft Backfill Injector Yes

Boat Type 141Slots loader

Boat Material SiC with CVD-Coat

Boat Rotation Yes

Pedestal Type Quartz+SiC

Cap Heater Yes

Auto Shutter Shutter Purge Type

Earthquake Countermeasure N/A

 

Voltage 3phase 480VAC

3phase connebtion type Beaker Terminal

Voltage Single-phase 120VAC

Single-phase connection type Beaker Terminal

Frequency 60Hz

Wattmeter Maler / Model None

Control Power UPS provided by Customer

Control Power UPS type Fab-wide system

UPS Input Voltage / Output Voltage N/A

Power Cable Input Entrance Location Power Box Top

FNC - Power Box

Power Box - RCU

Power Box - Pump Unit

Power Box - Refill System (if used) N/A

Power Box - WVG CTRL Unit (if used) N/A

FNC - WVG CTRL Unit (if used) N/A

Power Box - Scrubber System (if used) N/A

Power Box - Ozone Delivery System (if used) N/A

Power Box - UPS (if used) N/A

Wiring by Customer

Conduit/Raceways provided by Customer

Host Communications Comply with GJG

Equipment Host I/F Connection Gas box top (OP)

Ingenio Yes

OHT Capability Yes

AGV Capability None

RGV Capability None

PGV Capability None

PIO I/F Location FNC Top

PIO Provided by TEL

PIO Maker /Model Hokuyo / DMS-HB1-Z05

Carrier ID Reader Writer Type RF

CIDRW Load Port Read

CIDRW FIMS Write

CIDRW Maker / Model OMROM/V700-L21

CIDRW Provided by TEL

EEC(Equipment Engineening Capability) None

Customized Management Signals(for WAVES) N/A

Signal Tower Model LOUGWB-24-4

Signal Tower Colors (from the Top) Red/Blue/Yellow/Green

Signal Tower Location Front / operation panel type

Front Operation Panel Yes

MMI and Gas FlowChart FPD & GFC installed

Indicator Type Selete

Operator Switch Operator Access/White Cover with Orange Light

Pressure Display Unit (Gas Inlet / Vacuum) MPa / Torr

Cabinet Exhaust Pressure Display Unit Pa

Waming Label English

 

Gas Leak Detector Yes

Gas Leak Detector Provided By TEL

Gas Leak Detector Maker Riken

Gas Detector Power Power box

 

Damage/Missing parts list

Dry pumps are not included with sales

Please inspect tool to reconfirm

 

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