Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. TELFORMULA ALD High-K

Asset ID: 28225

Print spec sheet

Tokyo Electron Ltd.

TELFORMULA ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Original PO Configuration. Audit to verify.


General Specification: 

Safety Specification: SEMI S2-0703

Heater Model: Mid-Temp. VCM-50-012L

Compatible with Atmoshpheric Process: None

Maximum Operating Temperature (C): 300

ART Control: Yes

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 50

Software Version (WAVES): Ver.2.12 R008

Seismic Isolation Configuration: None


Furnace Spec, Furnace: 

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: 20m

Ionizer (maker/model): None

Chemical PreFilter-Acid: None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarbon: Yes

Chemical PreFilter-Location: FNC Top

Side Maintenance: None


Furnace Spec, Wafer/Carrier Handling

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris / A300

Carrier Stage Capacity: 10

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3


Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: Bottom Connection

Electric Fan Exhaust Facility Connection: Not Installed

Air Intake Point: Top


Gas Spec, Gas Distribution System

IGS Type: IGS 1.125"W-Seal rail-mount

IGS Maker: Fujikin

Tubing Bends: Bend (Less than 90deg)

IGS Final Filter: PALL

IGS Regulator: CKD

IGS MFC (Maker/Type): HORIBA STEC / Digital

IGS MFC for low flow N2 purge when cleaning: HORIBA STEC / SEC-G111

IGS Press. Transducer: Nagano

"Liquid Source Vapor System Maker / Model: For TMA HORIBA STEC / LSC-F530

For ZAC HORIBA STEC / TL-2014"

Auto-Refill System- TMA: Air Lequide / CANDI

Auto Refill System- ZAC: Air Lequide / CANDI

Auto Refill System Provider: Provided by customer

Refill System Tubing interconn: Provided by customer

Refill System Tubing interconn: Provided by customer

Ozone Delivery System: OP-500H-RE1

Ozone Delivery System Provider: Provided by customer

Water Vapor Generator (WVG): None

Injector O-ring material: DU353


Gas Spec, Gas Facilities

Incoming Gas Connection Point: Bottom Connection

Gas VENT Connection Point: Bottom Connection

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection


Exhaust Specification

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer

"Main Valve: CKD / Valve: VEC-VH8-X0110

  Controller: VYX-0279-CONT"

Pump Maker/Model: EDWARDS / iXH1820

Pump Provided by: Provided by customer

Abatement System Type: Burning Type

Abatement System (Maker/Model): EDWARDS /TPU(Zenith)

Abatement System Provider: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: None

Pump-FNC Vacuum Piping Provide: Customer

Exhaust Pressure Control (AP): N/A

Exhaust Pressure Controller (AP) Maker / Model: N/A

Exhaust Box: Wide Type (1200mmW)

Heating construction for Facility Exhaust: Between Pump and Abatement System

Heating construction for Facility Exhaust provided by: Customer

Exhaust O-ring material: DU353


Power Specification, Power dist System

Voltage 3phase: 400VAC & 200VAC(for Ozonizer)

3phase connection type: Star Connection

Voltage Single-phase: None

Single-phase connection type: N/A

Frequency: 60Hz

Wattmeter: None

Control Power UPS provided by: None

Control Power UPS type: N/A

UPS Input/Output Voltage: N/A


Power Specification, Cable Length

Power Cable Input Entrance Loc: Power Box Top

Other power requirement: None

FNC - Power Box: 30m

FNC - RCU: 30m

Power Box - RCU: 30m

Power Box - Pump Unit: 30m

Power Box - Refill System: 30m

Power Box - WVG CTRL Unit (if used): N/A

Power Box - Abatement System (if used): N/A

Gas Detector Box - FNC (if used): N/A

Gas Detector Box - Power Box (if used): N/A

Option Box - FNC (if used): N/A

Option Box - Power Box (if used): N/A


Interface Specification, Factory Automation System

Host Communications: Comply with GJG

Equipment Host I/F Connection: Power Box Top HSMS (10Base-T/100Base-TX)

Ingenio: Yes

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

Load Port Operation: Lower + Upper

PIO I/F Location: FNC Top

PIO Provided by: TEL

PIO Maker/Model: Hokuyo / DMS-HB1-Z

Carrier ID Reader Writer Type: RF

CIDRW Lower L/P: Read

CIDRW Upper L/P: Read

CIDRW FIMS: Read/Write

CIDRW Maker/Model: HOKUYO DMS-HB1-Z series

CIDRW Provided by: Customer

CIDRW Tag Orientation: Vertical

EEC (Equipment Engineering Cap: None

Customized Management Signals: PT/Water


Interface Specification, User Interface

Signal Tower Model: LCE Series

Signal Tower Colors: Red / Blue / Yellow / Green

Signal Tower Location: Front for 10 Stocker (Left)

Front Operation Panel: Yes

MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed

Light Curtain: None

Indicator Type: HOKUYO DMS-HB1-Z series

Operator Switch: Operator Access / White Cover with Orange Light

Pressure Display Unit: MPa / Torr

Cabinet Exh Pressure Display: Pa

Warning Label: Chinese/English

Special Label: None


Damage/Missing parts list

None reported, please inspect tool to reconfirm

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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