Macquarie Equipment Trading on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) TELINDY Plus ALD High-K

Asset ID: 13818

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELINDY Plus ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available


Configuration. Audit to verify.


Vertical ALD MD-ZrOx Furnace

TELINDY-PLUS for 300mm Wafers


------------------------

I. Base Unit for MDZrOx Process

a. Cabinets / units / Controllers

b. FOUP and Wafer Handling Automation

(18 FOUP Stocker)

c. Low Temp Heater : VMM-56-201

d. Integrated Gas System for MD ZrOx

- 2nd Gas Box (Bubbler unit for Zr precursor & TMA)

- 3rd Gas Box

(Bubbler Unit for Ti precursor)

- Ozonizer Interface box

(For MKS O3 Gen P/N AX8575-29)

- Purge N2

- Vaporizer unit for 3DMAS

-

e. Vacuum Foreline Configuration

including High Speed VEC

f. US Safety

-

II Per System Options

a. N2 Load Lock System

b. Dual Boat operation

c. Chemical Filter

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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