Macquarie Equipment Trading on behalf of Micron Technology, Inc. (VA)

Kokusai Electric Co., Ltd Zestone-III(C) DJ-1223V

Asset ID: 13810

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Kokusai Electric Co., Ltd

Zestone-III(C) DJ-1223V

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Tool Status: In production.

Configuration. Audit to verify.

DJ-1223V (Z3CN) 300mm Vertical
Nitride system as follows:

• 300 (12#) Wafer Capable, 125 Product Load Size
. Ceiling Sub Heater (Price Delta)
• Rapid Heating/Cooling (RHC)
• UPS (120V AC)
• SEMI S2-0200E Compliance

• Main and Sub (Rear) Operation Controllers (CX3010 and CX3002p)
• Two Gas Flow Pattern Panels (Front and Rear), UPS for Controller
• Exhaust APC Nitride
• Multi-Injector Option
• NH3 Purged Rotation
• Inlet Heater
• SUS inlet flange and seal cap
• NF3 Gas Cleaning

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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