Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
| Section 1. Tool General Information | |||
| Micron MISTI/LID # | WPSKBEAK00 | ||
| Vendor Tool Serial # | PSK07050 | ||
| Month / Year of Tool Move In | 20/4/2007 | ||
| Tool Availability Date | 1/31/2019 | ||
| Tool Current Status | De-installed | ||
| Tool working condition | Working | ||
| Tool Location | Warehouse | ||
| Any modification/conversion/refrofit was perform to the tool? | No | ||
| Section 2. Move-out constraint | |||
| Any layout/move-out path constraint | No | ||
| If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap. | |||
| Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer. | |||
| Section 3. Tool Specific Information | |||
| OEM | PSK | ||
| Tool Model | Supra IV | ||
| Process | Asher strip | ||
| Sending Site Workstation Name | 11-3PSK_S4_PICP_STR | ||
| Software Version (include revision #) | 1.91 | ||
| System Power Rating | 208V 3-Phase | ||
| Loading Configuration | 3 load position | ||
| Tool under OEM service contract? | No | ||
| System Configuration | |||
| Description | |||
| Tool: | |||
| HARDWARE CONFIGURATION | Description | Detail Description | |
| Load Port | Fixed Buffer | |
| Main Body | System wide corrosion free | Yes(SUS304) | |
| Main Body | Wafer Breakage Detection | ||
| Main Body | LCD Monitor | VX1500M-T | |
| System Controller | CPU | ||
| System Controller | Hard disk | ||
| System Controller | 1st data back-up | ||
| System Controller | 2nd data back-up | ||
| System Controller | Operation Monitor | 15" LCD | |
| System Controller | Signal Tower | 4 color Dual Polemount Type | |
| System Controller | R.C.S(Remote Control System) | ||
| Utility | Main Power | 3ψ 208VAC 60HZ 250A | |
| Utility | UPS Power | 1ψ 208VAC 60HZ 63A | |
| Utility | Power Vaccine | 1sec | |
| Utility | Electric & signal cable Length | 20M | |
| Utility | UPS Battery | YES | |
| Utility | Circuit Break Type | MCCB Type | |
| Utility | Water Manifold valve | Shut off v/v | |
| Utility | All Utility Feed Direction | Bottom-up feed | |
| Utility | |||
| Transfer module | TM ROBOT Body | ||
| Transfer module | TM ROBOT Controller | ||
| TM ROBOT Power box | ||
| Transfer module | EFEM ROBOT | ||
| Chamber 1 | |||
| Chamber 1 | APC valve | ||
| Chamber 1 | APC Controller | ||
| Chamber 1 | Baratron Sensor | ||
| Chamber 1 | Pressure Transducer (pirani) | ||
| Chamber 1 | EPD Controller | ||
| Chamber 1 | Heater Module | ||
| Chamber 1 | PICP | ||
| Generator | ||
| Chamber 1 | Gas Box | IGS Type | |
| Chamber 1 | Pressure Control | Throttle Valve | |
| Chamber 1 process gas line | GAS #1(O2) | 10slm | |
| Chamber 1 process gas line | GAS #2(N2) | 3slm | |
| Chamber 1 process gas line | GAS #3(NH3) | 5slm | |
| Chamber 1 process gas line | GAS #4(H2N2) | 5slm | |
| Chamber 1 process gas line | Purity | 10RA | |
| Chamber 1 process gas line | MFC Signal | Digital | |
| Chamber 1 process gas line | Gas Line Polishing | Electrical Polished | |
| Chamber 1 process gas line | Regulator | ||
| Chamber 1 process gas line | Air Operated Valve | ||
| Chamber 1 process gas line | Filter | ||
| Chamber 1 process gas line | Pressure Transducer | ||
| Chamber 2 | |||
| Chamber 2 | APC valve | ||
| Chamber 2 | APC Controller | ||
| Chamber 2 | Baratron Sensor | ||
| Chamber 2 | Pressure Transducer (pirani) | ||
| Chamber 2 | EPD Controller | ||
| Chamber 2 | Heater Module | ||
| Chamber 2 | PCIP | ||
| Chamber 2 | Generator | ||
| Chamber 2 | Gas Box | IGS Type | |
| Chamber 2 | Pressure Control | Throttle Valve | |
| Chamber 2 process gas line | GAS #1(O2) | 10slm | |
| Chamber 2 process gas line | GAS #2(N2) | 3slm | |
| Chamber 2 process gas line | GAS #3(NH3) | 5slm | |
| Chamber 2 process gas line | GAS #4(H2N2) | 5slm | |
| Chamber 2 process gas line | Purity | 10RA | |
| Chamber 2 process gas line | MFC Signal | Digital | |
| Chamber 2 process gas line | Gas Line Polishing | Electrical Polished | |
| Chamber 2 process gas line | Regulator | ||
| Chamber 2 process gas line | Air Operated Valve | ||
| Chamber 2 process gas line | Filter | ||
| Chamber 2 process gas line | Pressure Transducer |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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