Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hsinchu 300, Taiwan
Available date: Currently Available
Install Date is 2010Y
Date of last PM is 2011Y
The system not On-Line
The equipment cannot produce Wafers As-Is
SEZ Spin Processor Model is SP203
Main Frame Software Version is 114 (07.05.2001)
UI (Front) is present
UI (Rear) not Present
Chuck Size (Left) is 8"
Chuck Size (Right) is 8"
ULPA Filter (Top of Main Unit)
No Flip Module
No End Point Detection System
No Horiba concentration Monitor (HF Monitor)
No Heat Exchanger #1 (std)
No Heat Exchanger #2 (for control up to 65°C)
Number of Load-ports is 2 std
Load-port Size (Left)is 8
Load-port Size (Right) is 8
Load-port Adapters is 8
No Wafer ID Reader
No RFID Reader
No Ozone Module
Supporting Equipment / Sub-Fab
Power Distribution Box (PDB)
All Cables Present are present
Chemical Config Chemicals
Chemical Module 1 is EMPTY
Chemical Module 2 is EMPTY
Chemical Module 3 is EMPTY
No Bulk Chem Delivery system (BCD)_Active
No Bulk Chem Delivery system (BCD)_Passive
Damaged parts:SMIF #A
Missing parts:Robot / Hauser*2 set
1. The main unit is currently powered off, with 2.3 KW Heating module X 4 set attached.
2. The functions of each CDS Medium of the machine are normal, Medium#1 lacks Process pump(PS-20MA), Medium#2 lacks Filling pump(E10TTT), Medium#3 lacks Process pump(PS-20MA)T.
3. SMIF#A is abnormal to be repaired, SMIF#B can be used normally.
4. Missing parts for the main unit: Robot, Hauser X2 set.
5. The system computer and related circuit components are not removed.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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