Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

Ulvac Corporation Entron-EX

Asset ID: 207146

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Ulvac Corporation

Entron-EX

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 5/2017

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

OEM  Ulvac 
Tool Model  Entron EX 
Process  Mat X 
Software Version  Ver.357-15 
System Power Rating   208 AC 60 Hz 3-Phase 
Loading Configuration  3 Load Ports 
   DescriptionChemicals / Gases Used
Chm/Unit Position   F1  Normal ChamberArgon, Nitrogen, Carbon
Chm/Unit Position   F4  Normal ChamberArgon, Nitrogen, Carbon
Chm/Unit Position   R1  Mat X ChamberArgon, Mat X Material
Chm/Unit Position   R2  Normal ChamberArgon, Tungsten
Chm/Unit Position   R3  Normal ChamberArgon, Tungsten
Chm/Unit Position   R4  Mat X ChamberArgon, Mat X Material
Chm/Unit Position   B1  AnnealArgon
Chm/Unit Position   B2  AnnealArgon


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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