Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· Data Collection
· Uses collection event reports (Stream 6)—sent when state transition occurs
· Wafer summary data
· Raw data
· Statistics data
· Single scan data sent after each scan
· Process Program Management
· Remote unformatted process program management supported
· Stream 9 error messages are supported
· CLOCK
· Host can read or set profiler clock
· Can be linked to data collection reports
· Remote Control Settings
· Start, Stop, Abort (level 1) and PP-Select
· Process States
· ISEM defined process state model
· Terminology modified for metrology
· Reports can be linked to state transitions
· Control States
· GEM defined control state mode
· Local and Remote modes
· SECS interface
· Data Set Transfers (Stream 13) not included
· Raw data files (wafer maps) not available via SECS
· Dimensions
· 49.7 inches (126.2 cm) depth x 45 inches (114.3 cm)
· Width x 64 inches (162.6 cm) height
· Electrical Power
· HRP-320 230 VAC, 15A 50/60 Hz, single phase
· HRP-340 Etch DF 230VAC, 15.A, 50/60Hz, single phase
· Additional details available upon request.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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