Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) CLEAN TRACK LITHIUS

Asset ID: 79234

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Tokyo Electron Ltd. (TEL)

CLEAN TRACK LITHIUS

Multi Block (Resist Coater/Developer)

Resist Processing Equipment

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 3/31/2023

Tool config is based on original PO, please verify tool details at tool inspection


Process: 365nm

Software Version: 300.0.73.700

System Power Rating: 208V AC 3-Phase 

Loading Configuration: 6 load positions


Chm Position 1: COT Cabinet, Chemicals / Gases Used: PGMEA

Chm Position 2: DEV Cabinet, Chemicals / Gases Used: TMAH-2.38%(N)


System Configuration

Lithius Track

COT Cabinet

DEV Cabinet

CUP THC

CUP THC (2)

AC Power Box


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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