Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
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Varian Semiconductor Equipment Associates (VSEA)
Date of Manufacture: 2001-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Tainan 744, Taiwan
Available date: Currently Available
Need use the destructive methods to deinstallation the equipment. MANY COMPONENTS ARE MISSING.
Damage/Missing parts list, please inspect tool to reconfirm.
Dry pumps and Chiller and Cryo Compressors not included on sales.
Inspect to confirm configuration and condition.
Loading Configuration FOUP
Number of Cassette/FOUP Positions is 4
Loadport Make/Model ASYST 300 OHT Transport (300mm)
Date of Last PM is 2013/5
The system not On-Line
Off-Line Date is 2014
All Cables are Present
GEM/SECS Interface
Standard Network Communication Capability
Mid Current 810 Classic
Energy Range is 270kv
Maximum Energy is 270kv
Dose Range is 1e11~1e13
Programmable Tilt Angle is 7
Tilter Head Revision is Type c
Bernas source
Dual Vaporizer
Dimmer Magnet Turbo
Source Turbo
EndStation Turbo
Process Chamber Cryo (x3)
Scan Chamber Cryo
Gas Type
1.HP
2.SDS
3.SDS
4.SDS
Chiller not Included
Dry Pumps not Included
Dry Pump Make Model is IQDP80
Dry Pump Make Model is IQDP80-500
Cryo Compressors not Included
Make Model is CTI
Quantity is 2
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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