Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Trias EX-II Ti/TiN

Asset ID: 209911

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Tokyo Electron Ltd. (TEL)

Trias EX-II Ti/TiN

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: TRIAS

Software Version: V3.700R1

System Power Rating: 200V AC 3-Phase

Loading Configuration: 3 load ports


Chamber 1:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2

Chamber 2:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2

Chamber 3:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2

Chamber 4:EXII TISIN; Chemical: TiCl4. Gas: DCS/TiCl4/NH3/ClF3/DCS/N2


Process Unit: EXII TISIN

Controller: P/N : BX80-000222-11, BOX ASSY,EQUIPMENT CONT BOX


Process position: Trias EX-II TiSN

Process capability: TiSIN

Chamber hardware: EXII TISIN


System Software

Software Revision: SYSTEM:V3.700R1


Factory Interface System

Carrier: FOUP 25 slots cassette

Number of Load Port: 3

Loader arm: Dual arm type/Taper Pick

The number of LLM: 2

LLM bleed gas: N2


Transfer, Vaccuum, Exhaust, Cooling Water Systems

Transfer arm: Twin pick type

TM bleed gas: N2

The number of Aligner: 1 (located in LM)

TM Robot: BX80-070760-17 ARM,WO PICK,C..BR942304 (YASKAWA)

Loader Robot: BX80-080118-12 Type:SBX92102651-2 (SHINKO)

Pressure sensor: INFICON VSA100A

LLM1/LLM2-Door valve: SMC CBM2B40-N4640-90

LLM1/LLM2-Gate valve: V TEX I-I-00078-2-01


Chamber TEL TRIAS TIN

1333Pa Manometor: 3M36-000364-11 SENSOR,PRESSURE 631C-30603 

133kPa Capacitance manometer: 3M36-000096-12 SENSOR,PRESSURE 

Gate Valve (Slit Valve): KITZ 3M12-000150-13 VALVE,GATE UXG1236H-KL-122

APC Valve: 3M12-000207-11 VALVE,BUTTERFLY PCV-50-2

Cubic Trap: MATC MATE-0027PM (V9 trap)

Pressure Gauge, exhaust system: KRONE KU-604 series

Flow Meter for cooling water: TOFLO TPS series

Divert Interlock Interface: no divert line


Gas Box Configuration

Gas Stick 1: N2 5slm HORIBA STEC

Gas Stick 2: N2 10slm HORIBA STEC

Gas Stick 3: N2 10slm HORIBA STEC

Gas Stick 4: N2 2slm HORIBA STEC

Gas Stick 5: N2 10slm HORIBA STEC

Gas Stick 6: N2 300sccm HORIBA STEC

Gas Stick 7: TiCl4 300sccm HORIBA STEC SEC-8000F/D series

Gas Stick 8: empty

Gas Stick 9: empty

Gas Stick 10: NH3 10SLM HORIBA STEC

Gas Stick 11: NH3 2SLM HORIBA STEC

Gas Stick 12: ClF3 500sccm HORIBA STEC

Gas Stick 13: DCS 200sccm HORIBA STEC

Heater Bottom Purge: N2 5slm HORIBA STEC

Gas Filters (N2-1/N2-2): Nippon SeisenNASclean GF series

Gas Filters (NH3/ClF3): Nippon SeisenNASclean GF series

Regulators: CKD PGM series


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales



Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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