Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Rudolph Technologies, Inc. NSX 105

Asset ID: 207540

Print spec sheet

Rudolph Technologies, Inc.

NSX 105


Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: 9/30/2022

PROBE TCP-3ONTO_NSX105_MACRINSP_01 Onto innovation NSX105 Inspection



  • Rudolpht NSX-105
  • Loading Configuration : Open Cassette & FOUP
  • Type: Macro Inspection
  • Wafer Size: 100mm to 300mm

System Feature:

  • Throughput: Up to 120 Wafers per hour
  • Performance: Up to 60MB processing / Sec
  • Review Camera: Adimec 33 FPS 3CCD Color
  • Illumination: High Speed Strobe
  • Staging: Using Continuous Scan Technology
  • Inspection Axis: Linear motor drive
  • Support Wafer: 100mm to 300mm (<300 on film frames)
  • Defect Sensitivity: To 0.5micron (User Adjustable)
  • Dark Field Option: Yes
  • OS: Windows XP
  • Computer: 2.4Ghz
  • Image Processing System: Genesis (2 nodes)
  • Data Collection: Automatic
  • Platform: Aluminum hard anodized with Ni Plating
  • Turret Assembly: 1X , 2X, 5X, 10X and 20X
  • 2D Defect and Metrology Verification Standard: NIST Certified
  • Mini Environment for Wafer Handling: Class 100 with 600CFM
  • Filter Blower Ionizer for Clear Air: Included
  • Light Tower: Included
  • Docking Module: Included
  • Multipass Software: Included
  • Single OCR: Whole Wafer Only
  • Wafer Map Integration and Test Service: Included
  • DCS I: Defect Capture Station Stand alone Capturing Images from Inspection system
  • Review Pilot Software: Included
  • High Speed Focus Map Sensor (Point Sensor): Resolution 0.02um measuring range +-1/0 working distance 10mm spot dimeter 20um, response time 200ms Linearity +-0.03% of F.S. Visible Red 650nm Laser Light Source

Facility: Configuration:

  • Single Phase + GRD
  • Power: 200-240 VAC @ 50/60 Hz
  • Full Load: 40 Amps
  • Largest load: 8Amp
  • House Vacuum CDA
  • Weight: 2000 lbs

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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