Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch

Rudolph Technologies, Inc. S3000A

Asset ID: 30201

Print spec sheet

Rudolph Technologies, Inc.

S3000A

Ellipsometer

Metrology Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Tool is in storage Schenker HK Taiwan

Process: QE 

Manufacturer (Make): 

Install Type: Stand-Alone
Can Produce Wafers As-Is: Yes
CE Mark Certified: Yes
Are any Manuals included: No

Overall Tool Condition
Any Field Modifications: No
All Cables present: Yes
Any Corrosion visible on modules: No
Any Missing / Damaged Parts : No
Shipping Brackets Included : No

Wafer Handler
Handler Type:EFEM, 2 WIDE M122 SYSTEM. P/N:AUA0023A
# of Cassette / FOUP Loaders: 2
Robot Type:Yaskawa. XU-RC400M-D03
End-Effecter Type:VGEE,(Packaged) Vac Grip. W/O:Mapping, 140W, 186L
Pre-Aligner: No
Mini-Environment:Yes
Handler Options: No

System SW (OS) version:Microsoft Windows XP Professional Version 2002 SP2
System SW (App): version:5.2.0.1
Log-In User Name:Mfg
Log-In Password:mfg
Any SW Options:No
SEMI Std Options (E84, E99, etc..):E84, E99

Power Supply: No
AC Dist Box: No
Ext Transformer: No
UPS: No
Heat Exchanger / Chiller: No
Backing Pump(s): No

Facility Requirements
CDA:5.27 ~ 6.33( kg/cm2 )
DIW:None
Vacuum:508+-76 (-)mmHg
Gas: None
Power:200/220VAC 60HZ 50 Amps

Tool Damage/Missing Parts: 
Please inspect tool to reconfirm
Dry pumps not included

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.