Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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ECD (Electro Chemical Deposition)
Date of Manufacture: 2010-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Process: 91/92 copper plating
Software Version: 2.13.4.24
System Power Rating: 480AC 3-phase
Loading Configuration: 3 load ports
Chm/Unit Position 1: Tank 1 H2O2-30% / H2SO4-96%
Chm/Unit Position 2: Tank 2 H2O2-30% / H2SO4-96%
Chm/Unit Position 3: Tank 3 CuSO4 catholyte
Chm/Unit Position 4: Tank 4 CuSO4 anolyte
Capsule Chamber: Rinse dry with bevel etch capability
CFD3m Chamber: Electroplating chamber with membrane
Loadport: FOUP Load/Unload Station
Buffer station: 16 slots (8 in put / 8 out put)
Transfer Robot: XT Robot with Delta TAU CTRL
Process Robot: XT Robot with Delta TAU CTRL
Tank 1: 20L Delivery Tank
Tank 2: 10L Mixing Tank
Tank 3: 180L Catholyte Tank
Tank 4: 65L Anolyte Tank
Exhuast: Bottom exhaust (8" *2 / 6" *1)
Chemical Connections: Catholyte A 180L
Chemical Connections: Anolyte A 65L
Chemical Connections: H2SO4
Chemical Connections: H2O2
Gas Connections: CDA
Chemical Connections: DI
Gas Connections: N2
Chemical Connections: House Vacuum
Fire Suppression: Scorpio CO2 cylinder, 3 Cylinder
Chiller: PAA-030L
Heater: PNE-H20K
RTA Real Time Analyzer: Capsule Chamber: Rinse dry with bevel etch capability
ULVAC: Insitu Metrology Unit, Eddy current measurement unit to monitor
Cu film thickness
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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