Macquarie Equipment Trading on behalf of Macquarie Finance Korea Co., Ltd. 3237

KLA-Tencor Corp. Puma 9650

Asset ID: 10924

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KLA-Tencor Corp.

Puma 9650

Darkfield Inspection

Metrology Equipment

Equipment details:

Date of Manufacture: Mar-2014

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

  1. 9650 system
    1. TFIMS, Phoenix v2.0 S4 Cool
    2. TFIMS PHX Ship Kit
    3. Line Cond, 28kVA
    4. 25 cassette HW and 300mm SW
    5. FFU Analog
    6. Includes DSW 16.3 Type 2 wafer (1 unit), DSW 065 wafer (1 unit) and Shiny wafer (1 unit).
    7. sL685
    8. 300mm PSL Wafer Kit
    9. Triple Loadport Info Pad Kit
    10. Exhaust Down, PUMA
    11. Ext Blower Cable,20m(65ft)
    12. NFS Software
    13. Sizing
    14. FDC
    15. Swagelok Fittings
    16. GEM/SECS and HSMS
    17. t system (High Speed Messaging System)
    18. E84 Enablement for OHT with Three OHT Hokuyo PI/O Devices
    19. E87 Carrier Management Services, E39 Object Services and E90 Substrate Tracking
    20. E40 Process Job Management and E94 Control Job Management
    21. Three Omron Radio Frequency (RF) Carrier ID Readers
    22. Painted Panel Light Curtain with Safety Skirt for Triple FIMS
    23. SatServer Upgrade
    24. Simulator
    25. Impact
    26. Remote Control Client

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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