Tokyo Electron Ltd. (TEL) Expedius

Equipment details:

Date of Manufacture: 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: LAL

Tool config is based on original PO, please verify tool details at tool inspection

Tank: LAL30

Guide Material:PCTFE

Process Bath   Material:PTFE

Temp.:20℃

Mixing Ratio (1): "LAL30 

1:0"

Replenishment: Time   Yes

Replenishment:Level   Yes

Replenishment:Recipe   Yes

Replenishment:Pre/Post/Interval   Yes

Replenishment:Batch Count   Yes

Bath Function:Bath Autocover   Yes

Bath Function:Bath Cleaning   Yes

Bath Function:Sampling Line   Yes

Pump      IWKI : FF-20-BT1

Heater      Coolnics(NES-3123C-7-T)

Filter      "IHAT01M01K 0.01um"

Conc. Monitor      "CS-13M-777-

18P5390340P5P5"

Drain Line:WD1N   Yes

Drain Line: WD2 (Neutralization Waste Water Treatment)   Yes

Drain Line: WD3 (UPW Reclaim)   Yes

Tank: QDR

Guide Material:PCTFE

Process Bath   Material:Quartz

Temp.:RT

Bath Function: Over Flow Rinse Yes

Bath Function: Shower(Spray) Yes

Drain Line:WD1 (HF Waste Water)   Yes

Drain Line:WD3 (UPW Reclaim)   Yes

Tank: POU1

Guide Material:Quartz

Process Bath   Material:PTFE

Temp.:RT/70℃

Mixing Ratio (1): HF:H2O

Mixing Ratio (2):"NH4OH:H2O2:H20

1:10:400

1:4:400

1:1:200"

Mixing Ratio (3):"NH4OH:H2O

1:100~1:200"

Mixing Ratio (4):"H2O2:H2O

1:15~1:200"

Mixing Ratio (5):"HCL:H2O2:H2O

 1:1:50 ~ 1:1:100"

Bath Function: Over Flow Rinse Yes

Bath Function: Shower(Spray) Yes

Bath Function: Agitation Yes

Bath Function: Megasonic SSDM 2800W

Bath Function: Hot DIW Generator PWH-144I-T-R

Bath Function:Sampling Line   Yes

Cold DIW (Facility): 40 ~ 60 L/min

Hot DIW (Facility): 40 ~ 60 L/min

Conc. Monitor: "DHF/NH3 (HF-960M)

APM/HPM(CS-15M~)"

Drain Line:WD1 (HF Waste Water)   Yes

Drain Line: WD2 (Neutralization Waste Water Treatment)   Yes

Drain Line: WD2N (Alkali Conc.)   Yes

Drain Line: WD3 (UPW Reclaim)   Yes

Tank: POU

Guide Material:Quartz

Process Bath   Material:PTFE

Temp.:RT/70℃

Mixing Ratio (1): HF:H2O

Mixing Ratio (2):"NH4OH:H2O2:H20

1:10:400

1:4:400

1:1:200"

Mixing Ratio (3):"NH4OH:H2O

1:100~1:200"

Mixing Ratio (4):"H2O2:H2O

1:15~1:200"

Mixing Ratio (5):"HCL:H2O2:H2O

 1:1:50 ~ 1:1:100"

Bath Function: Over Flow Rinse Yes

Bath Function: Shower(Spray) Yes

Bath Function: Agitation Yes

Bath Function: Megasonic SSDM 2800W

Bath Function: Hot DIW Generator PWH-144I-T-R

Bath Function:Sampling Line   Yes

Cold DIW (Facility): 40 ~ 60 L/min

Hot DIW (Facility): 40 ~ 60 L/min

Conc. Monitor: "DHF/NH3 (HF-960M)

Drain Line:WD1 (HF Waste Water)   Yes

Drain Line: WD2 (Neutralization Waste Water Treatment)   Yes

Drain Line: WD2N (Alkali Conc.)   Yes

Drain Line: WD3 (UPW Reclaim)   Yes

Tank: SD2

Guide Material:PCTFE

Process Bath   Material:PTFE

Temp.:RT

Bath Function: Over Flow Rinse Yes

Bath Function:Bath Autocover   Yes

Bath Function:N2 Purge   Yes

Cold DIW (Facility): 40 ~ 60 L/min

Filter      PIPW15C3S (Metal)

Drain Line: WD3 (UPW Reclaim)   Yes

Drain Line: WD7 (Organic Waste Water)   Yes

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales