Equipment details:
Date of Manufacture: 2005
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 12/17/2021
Process: LAL
Tank: LAL30
Guide Material:PCTFE
Process Bath Material:PTFE
Temp.:20℃
Mixing Ratio (1): "LAL30
1:0"
Replenishment: Time Yes
Replenishment:Level Yes
Replenishment:Recipe Yes
Replenishment:Pre/Post/Interval Yes
Replenishment:Batch Count Yes
Bath Function:Bath Autocover Yes
Bath Function:Bath Cleaning Yes
Bath Function:Sampling Line Yes
Pump IWKI : FF-20-BT1
Heater Coolnics(NES-3123C-7-T)
Filter "IHAT01M01K 0.01um"
Conc. Monitor "CS-13M-777-
18P5390340P5P5"
Drain Line:WD1N Yes
Drain Line: WD2 (Neutralization Waste Water Treatment) Yes
Drain Line: WD3 (UPW Reclaim) Yes
Tank: QDR
Guide Material:PCTFE
Process Bath Material:Quartz
Temp.:RT
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Drain Line:WD1 (HF Waste Water) Yes
Drain Line:WD3 (UPW Reclaim) Yes
Tank: POU1
Guide Material:Quartz
Process Bath Material:PTFE
Temp.:RT/70℃
Mixing Ratio (1): HF:H2O
Mixing Ratio (2):"NH4OH:H2O2:H20
1:10:400
1:4:400
1:1:200"
Mixing Ratio (3):"NH4OH:H2O
1:100~1:200"
Mixing Ratio (4):"H2O2:H2O
1:15~1:200"
Mixing Ratio (5):"HCL:H2O2:H2O
1:1:50 ~ 1:1:100"
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Bath Function: Agitation Yes
Bath Function: Megasonic SSDM 2800W
Bath Function: Hot DIW Generator PWH-144I-T-R
Bath Function:Sampling Line Yes
Cold DIW (Facility): 40 ~ 60 L/min
Hot DIW (Facility): 40 ~ 60 L/min
Conc. Monitor: "DHF/NH3 (HF-960M)
APM/HPM(CS-15M~)"
Drain Line:WD1 (HF Waste Water) Yes
Drain Line: WD2 (Neutralization Waste Water Treatment) Yes
Drain Line: WD2N (Alkali Conc.) Yes
Drain Line: WD3 (UPW Reclaim) Yes
Tank: POU
Guide Material:Quartz
Process Bath Material:PTFE
Temp.:RT/70℃
Mixing Ratio (1): HF:H2O
Mixing Ratio (2):"NH4OH:H2O2:H20
1:10:400
1:4:400
1:1:200"
Mixing Ratio (3):"NH4OH:H2O
1:100~1:200"
Mixing Ratio (4):"H2O2:H2O
1:15~1:200"
Mixing Ratio (5):"HCL:H2O2:H2O
1:1:50 ~ 1:1:100"
Bath Function: Over Flow Rinse Yes
Bath Function: Shower(Spray) Yes
Bath Function: Agitation Yes
Bath Function: Megasonic SSDM 2800W
Bath Function: Hot DIW Generator PWH-144I-T-R
Bath Function:Sampling Line Yes
Cold DIW (Facility): 40 ~ 60 L/min
Hot DIW (Facility): 40 ~ 60 L/min
Conc. Monitor: "DHF/NH3 (HF-960M)
Drain Line:WD1 (HF Waste Water) Yes
Drain Line: WD2 (Neutralization Waste Water Treatment) Yes
Drain Line: WD2N (Alkali Conc.) Yes
Drain Line: WD3 (UPW Reclaim) Yes
Tank: SD2
Guide Material:PCTFE
Process Bath Material:PTFE
Temp.:RT
Bath Function: Over Flow Rinse Yes
Bath Function:Bath Autocover Yes
Bath Function:N2 Purge Yes
Cold DIW (Facility): 40 ~ 60 L/min
Filter PIPW15C3S (Metal)
Drain Line: WD3 (UPW Reclaim) Yes
Drain Line: WD7 (Organic Waste Water) Yes
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps not included on sales