Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. Expedius+

Asset ID: 11289

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Tokyo Electron Ltd.

Expedius+

Batch Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 2008

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: HFAPM


Tool config is based on original PO, please verify tool details at tool inspection


M/S      POU1

Guide Material      Quartz

Process Bath   Material   PTFE (MFB)

Temp.      RT~65C

Mixing Ratio (1)      HF:H2O;1:500;1:1000;1:1500

Mixing Ratio (2)      NH4OH:H2O2:H20;1:4:130;2:3:100;1:1:125

Mixing Ratio (3)      NH4OH:H2O

Mixing Ratio (4)      HCL:H2O2:H2O

Bath Function

 Over Flow Rinse   Yes

 Shower(Spray)   Yes

 Agitation   Yes

 Megasonic   SSDM 2800W

 Hot DIW Generator   PWH-144I-T-R

 Resistivity Meter   Yes

 Sampling Line   Yes

Cold DIW (Facility)      40L/min

Hot DIW (Facility)      40L/min

Heater      H-DIW Gene & Facifity

Conc. Monitor      DHF/HCL/NH4OH/HF960M; SC1 CS-100F1

Drain Line

 WD1 (HF Waste Water)   Yes

 WD2 (Neutralization Waste Water Treatment)   Yes

 WD2N (Alkali Conc.)   Yes

 WD3 (UPW Reclaim)   Yes


M/S      POU2

Guide Material      Quartz

Process Bath   Material   PTFE (MFB)

Temp.      RT~65C

Mixing Ratio (1)      HF:H2O;1:500;1:1000;1:1500

Mixing Ratio (2)      NH4OH:H2O2:H20;1:4:130;2:3:100;1:1:125

Mixing Ratio (3)      NH4OH:H2O

Mixing Ratio (4)      HCL:H2O2:H2O

Bath Function

 Over Flow Rinse   Yes

 Shower(Spray)   Yes

 Agitation   Yes

 Megasonic   SSDM 2800W

 Hot DIW Generator   PWH-144I-T-R

 Resistivity Meter   Yes

 Sampling Line   Yes

Cold DIW (Facility)      40L/min

Hot DIW (Facility)      40L/min

Heater      H-DIW Gene & Facifity

Conc. Monitor      DHF/HCL/NH4OH/HF960M; SC1 CS-100F1

Drain Line

 WD1 (HF Waste Water)   Yes

 WD2 (Neutralization Waste Water Treatment)   Yes

 WD2N (Alkali Conc.)   Yes

 WD3 (UPW Reclaim)   Yes


M/S      SC1(M/S)- Not used

M/S      POU3- Not Used


M/S      SD2

Guide Material      PVDF

Process Bath   Material   PTFE

Temp.      R.T

Mixing Ratio (1)      HF:H2O;1:100;1:500

Mixing Ratio (4)      HCL:H2O

Bath Function

 Over Flow Rinse   Yes

 Bath Autocover   Yes   

 N2 Purge   Yes

 Resistivity Meter   Yes

Cold DIW (Facility)      40L/min

Conc. Monitor      HF-960M

Drain Line

 WD1 (HF Waste Water)   Yes

 WD3 (UPW Reclaim)   Yes

 WD7 (Organic Waste Water)   Yes


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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