Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Edwards Atlas Etch

Asset ID: 209435

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Edwards

Atlas Etch

Abatement - Scrubber

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available


Excess itemsVendorModelQty
AbatementEDWARDSAtlas Kronis MK3B10
AbatementEDWARDSAtlas TCS MK31
AbatementEDWARDSAtlas TPU MK3B4
AbatementEDWARDSAtlas TPU2S MK21
AbatementEDWARDSHelios4 +s/m2
AbatementEDWARDSLegacy TPU2S + WRU5
AbatementEDWARDSLegacy TPU2S + SM + WESP1


ATLAS™ GAS ABATEMENT SYSTEMS

Atlas™ from Edwards: the range of combustion gas abatement solutions that offers semiconductor, flat panel display, Solar and MOCVD manufacturers reduced operating costs and enhanced ease-of-use. Atlas abatement technology specific to your process:

• Atlas TCS for common CVD gases (NF3/F2)

• Atlas TPU for PFC gases (ClF3, C2F6, C3F8) in CVD processes

• Atlas Kronis for the low-k CVD gases in next-generation processes

• Atlas Etch for semicon etch and flat panel display processes (CF4, SF6 and high flow PFC’s)

• Atlas Helios for safe treatment of hydrogen processes in epitaxy and MOCVD

Features and Benefits

• Low cost of ownership —— Low fuel consumption & Reduced running costs

• Excellent powder handling

• Excellent corrosion resistance

• Outstanding reliability, even on the harshest applications

• Ease of maintenance

• Third party certification —— SEMI® S2, CE marked, ETL listed

• Unrivalled abatement performance for deposition and clean gases

• Flame retardant plastic used in wet stage —— No corrosion from acidic by-products & Lower risk of thermal discharge


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