Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Canon FPA-6000 ES5

Asset ID: 207747

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FPA-6000 ES5

248nm (KrF) Scanner

Lithography Equipment

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

PHOTO 11-3CAN_ES5_248_01 CANON ES5 248NM

Tool config is based on original PO, please verify tool details at tool inspection

Tool lenses data 8th Dec 2020 

Machine Type: FPA6000ES5           

Signal Tower: Yes              

Light Source Type: EX-Laser            

Laser Unit Type: G40K3             

Laser Communication: Yes              

Illumination System Type: ES5 Relay Optics        

Uniformity Sensor Type: UC2              

Lens Type: ULEX-04S2           

1st Input Lens Type: Exist             

2nd Input Lens Type: Eight slots          

AFIS Input Optics Type: None              

1st Stopper Type None              

2nd Stopper Type: Four slots with Iris      

Slit Type Type 3             

Image Shifter Type: Air Bearing          

Image Shifter Shape: Pyramid            

Lens NA Type: Type1             

Focus Sensor: CCD6              

OAS Focus Sensor: CCD1              

Focus Tolerance: 0.030 (um)

Wide Range Focus: 5.0 (um)

Tilt Tolerance wx/wy: 2.0 (ppm)

OAS Focus Tolerance: 0.150 (um)

AA Option Pattern Visible: Yes              

AA(Pre.) Bypass: Yes              

AA(OAS) Il. Option Mode: No               

Wavelength: B2 (590+-60)          

Sigma: Sigma0.9 (diffusion plate)   

Reticle Cassette Type: Standard            

Reticle Size: 6inch             

Reticle Thickness: 6.3mm             

Reserve Reticle ID: None              

Reticle SMIF: Exist             

Reticle Stock: Exist             

TAG Type: HERMOS TAG           

TAG Control: Special-1           

Reticle Barcode Type: Code3of9/C.D          

Particle Checker Type: PPC              

Pellicle Type: Type-A             

Pellicle Height: 6.3mm             

Pellicle Check: Yes              

New PPC Unit: Old              

Carrier System: Type10-L            

Wafer Size: 12inch             

Wafer Shape: NOTCH             

Wafer Material: Silicon Wafer         

WF Interface System: Open Car            

Carrier Slot No.: 25

Wafer Carrier Size D1: 36.000 (mm)

Wafer Carrier Size D2: 15.000 (mm)

Hand Thickness: 2.000 (mm)

Wafer Thickness: 0.775 (mm)

GEM2 (included ESPA): Yes              

Online: GEM2              

Damage/Missing parts list

Please inspect tool to reconfirm

Damage- FINGER UNIT,RH TYPE 10 (PSR finger hand3 broken)

Damage- 15 Inch Industrial Panel PC (Panel PC not work in both side)

Damage- PSR structure(SH) (PSR inner cable support frame broken)

Damage- Slit(6%) 

Damage- optical disk(MO) 

Damage- IL MPOS Slit(6%) 

Damage- Lifetime due- CPSU PW1 metal mulfunction 

Missing- EWS memory

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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