Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Cascade S300


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Asset ID: 209938

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Engineering Wafer Prober

Wafer Prober

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Tool ModelS300-973-HT/ERS SP72 300
Software VersionNucleus 3.3.6
System Power Rating110 AC
Loading Configuration1 for temp controller and 5 for bench and controller
Any equipment manuals available?  No
System configuration
main prober with microscope/ key board/joy stick
controller PC for nucleus software
1 external display
air cooler system (ERS air cool system, temperature range is from 0 to 300C)
 4 micro manipulator and probe card holder are included
Probe Station Performance 
X-Y Stage 
Travel: 301mm x 301mm (11.9 in. x 11.9 in.)
Resolution: 0.1 µm (0.004 mils)
Repeatability: ≤ 2 µm (0.08 mils) Speed: > 51mm/sec (2 in./sec.)
Accuracy: ≤ 4 µm (0.16 mils)
Bearings: Precision ball
Z Stage 
Travel: 10.0mm (395 mils)
Resolution: 1 µm (0.04 mils)
Repeatability: ≤ 3 µm (0.12 mils)
Speed: >15mm/sec (0.6 in./sec.)
Lifting capacity: ≤ 15kg (33 lb.) *
*Measured at edge of 300mm chuck
Theta Stage 
Travel: ± 7.5 degrees
Resolution: 0.5 µm (0.02 mils)*
Repeatability: ≤ 3 µm (0.12 mils)*
*Measured at edge of 300mm chuck
Size: 304mm (12 in.) diameter
2 integrated auxiliary stages: Multi-Zone vacuum controls
Flatness: thermal chuck < 30 µm; non-thermal 15 µm
Z lift range: 3mm (0.12 in.)
Z lift type: Precision 4-point Linear
Repeatability: ≤ 3 µm (0.12 mils)
Facility Requirements 
Vacuum: 400mm (15 in.) of Hg min.
Dry air purge: (thermal systems only) 3 liters per sec.
(6 SCFM) with dew point of <-65ºC Compressed air : 0.5 litres/sec (1-CFM @85 psi. min.)
Power: 115 V @ 2 A, 230 V @ 1 A 50/60Hz
Station: 132cm (W) x 113cm (D) x 108cm (H) (52 in. x 44 x 41 in.)
Net weight: 780 kg (1,720 lb.) including optics bridgemount
Regulatory Compliance 
All S300 series stations conform to CE mark and are ETL listed.

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