Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
| Tool Model | S300-973-HT/ERS SP72 300 | |
| Process | Probe | |
| Software Version | Nucleus 3.3.6 | |
| System Power Rating | 110 AC | |
| Loading Configuration | 1 for temp controller and 5 for bench and controller | |
| Any equipment manuals available? | No | |
| System configuration | ||
| main prober with microscope/ key board/joy stick | ||
| controller PC for nucleus software | ||
| 1 external display | ||
| air cooler system (ERS air cool system, temperature range is from 0 to 300C) | ||
| 4 micro manipulator and probe card holder are included | ||
| Probe Station Performance | ||
| X-Y Stage | ||
| Travel: 301mm x 301mm (11.9 in. x 11.9 in.) | ||
| Resolution: 0.1 µm (0.004 mils) | ||
| Repeatability: ≤ 2 µm (0.08 mils) Speed: > 51mm/sec (2 in./sec.) | ||
| Accuracy: ≤ 4 µm (0.16 mils) | ||
| Bearings: Precision ball | ||
| Z Stage | ||
| Travel: 10.0mm (395 mils) | ||
| Resolution: 1 µm (0.04 mils) | ||
| Repeatability: ≤ 3 µm (0.12 mils) | ||
| Speed: >15mm/sec (0.6 in./sec.) | ||
| Lifting capacity: ≤ 15kg (33 lb.) * | ||
| *Measured at edge of 300mm chuck | ||
| Theta Stage | ||
| Travel: ± 7.5 degrees | ||
| Resolution: 0.5 µm (0.02 mils)* | ||
| Repeatability: ≤ 3 µm (0.12 mils)* | ||
| *Measured at edge of 300mm chuck | ||
| Chuck | ||
| Size: 304mm (12 in.) diameter | ||
| 2 integrated auxiliary stages: Multi-Zone vacuum controls | ||
| Flatness: thermal chuck < 30 µm; non-thermal 15 µm | ||
| Platen | ||
| Z lift range: 3mm (0.12 in.) | ||
| Z lift type: Precision 4-point Linear | ||
| Repeatability: ≤ 3 µm (0.12 mils) | ||
| Facility Requirements | ||
| Vacuum: 400mm (15 in.) of Hg min. | ||
| Dry air purge: (thermal systems only) 3 liters per sec. | ||
| (6 SCFM) with dew point of <-65ºC Compressed air : 0.5 litres/sec (1-CFM @85 psi. min.) | ||
| Power: 115 V @ 2 A, 230 V @ 1 A 50/60Hz | ||
| Dimensions | ||
| Station: 132cm (W) x 113cm (D) x 108cm (H) (52 in. x 44 x 41 in.) | ||
| Net weight: 780 kg (1,720 lb.) including optics bridgemount | ||
| Regulatory Compliance | ||
| All S300 series stations conform to CE mark and are ETL listed. | ||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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