Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
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Dainippon Screen Mfg. Co. (DNS)
Date of Manufacture: 10/1/04
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Process: SCRUB
| Section 1. Tool General Information | ||||
| Micron MISTI # | WDNSB7RF00 | |||
| Vendor Tool Serial # | 700808300A(3A56DA0201) | |||
| Date of Tool Move-In | ||||
| Tool Availability Date | Refer to fan-out list | |||
| Tool Current Status | In production / | (Pls strike-off accordingly) | ||
| Tool working condition | Working / | |||
| Tool Location | Fab11 WET PROCESS | (Pls indicate nearest area, eg. Fab2 Photo) | ||
| Section 2. Tool Specific Information | ||||
| OEM | DNS | |||
| Tool Model | SS3000 SCRUB | |||
| Process | SCRUB_FS Processes | |||
| Software Version | ||||
| System Power Rating | 208V4W-N | (eg. 110 AC 3-Phase for System) | ||
| Loading Configuration | 3 load ports | (eg. 6 load positions for furnace or dual auto-indexer loaders) | ||
| Any
equipment manuals available? | (Pls strike-off accordingly) | |||
| Tool
under OEM service contract? | (Pls strike-off accordingly) | |||
| * Letter of Declaration to confirm service contract coverage will be provided upon request | ||||
| For multi-chms system, please indicate the chamber type & include photo of individual chm | ||||
| (Section is also applicable to tank configuration for Wet bench) | ||||
| Description | Chemicals / Gases Used | Photo Attached | ||
| Tank Position 1 | U03 | DIW | ||
| Tank Position 2 | U04 | DIW | ||
| Tank Position 3 | U05 | DIW | ||
| Tank Position 4 | U06 | DIW | ||
| System Configuration | ||||
| Description | Qty | |||
| Process Modules | 4 | |||
| IHU | 1 | |||
| MHU | 1 | |||
| Loadport | 4 | |||
| AC power box | 1 | |||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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