Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) TELFORMULA Nitride

Asset ID: 28229

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELFORMULA Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Process: NITR

From original tool PO, please inspect to verify

2.2- General Specification    SEMI S2-0703
2.2- General Specification    Mid-Temp. VCM-50-012L
2.2- General Specification    None
2.2- General Specification    800C
2.2- General Specification    Yes
2.2- General Specification    Yes
2.2- General Specification    300mm-Si SEMI STD-Notch
2.2- General Specification    50
2.2- General Specification    2.12 REV.R006
2.2- General Specification    None
3.1.1- Furnace Spec, Furnace    None
3.1.1- Furnace Spec, Furnace    White (LED)
3.1.1- Furnace Spec, Furnace    20m
3.1.1- Furnace Spec, Furnace    None
3.1.1- Furnace Spec, Furnace    None
3.1.1- Furnace Spec, Furnace    None
3.1.1- Furnace Spec, Furnace    Yes
3.1.1- Furnace Spec, Furnace    FNC Top
3.1.1- Furnace Spec, Furnace    None
3.1.2- Furnace Spec, Wafer/Carrier Handling    FOUP/25slots, SEMI STD
3.1.2- Furnace Spec, Wafer/Carrier Handling    Entegris/A300
3.1.2- Furnace Spec, Wafer/Carrier Handling    10
3.1.2- Furnace Spec, Wafer/Carrier Handling    Pin
3.1.2- Furnace Spec, Wafer/Carrier Handling    Pin
3.1.2- Furnace Spec, Wafer/Carrier Handling    Al2O3
3.1.3- Furnace Spec, Furnace Facilities    Top Connection
3.1.3- Furnace Spec, Furnace Facilities    Bottom Connection
3.1.3- Furnace Spec, Furnace Facilities    Not Installed
3.1.3- Furnace Spec, Furnace Facilities    Top
3.2.1- Gas Spec,  Gas Distribution System    IGS 1.5"W-Seal rail-mount
3.2.1- Gas Spec,  Gas Distribution System    Fuijikin
3.2.1- Gas Spec,  Gas Distribution System    Bend (Less than 91deg)
3.2.1- Gas Spec,  Gas Distribution System    Entegris
3.2.1- Gas Spec,  Gas Distribution System    CKD
3.2.1- Gas Spec,  Gas Distribution System    HORIBA STEC / Digital
3.2.1- Gas Spec,  Gas Distribution System    HORIBA STEC / SEC-G111
3.2.1- Gas Spec,  Gas Distribution System    Nagano
3.2.1- Gas Spec,  Gas Distribution System    HORIBA STEC / LSC-F510
3.2.1- Gas Spec,  Gas Distribution System    Schumacher / CG100
3.2.1- Gas Spec,  Gas Distribution System    Provided by customer
3.2.1- Gas Spec,  Gas Distribution System    Provided by customer
3.2.1- Gas Spec,  Gas Distribution System    None
3.2.1- Gas Spec,  Gas Distribution System    None
3.2.1- Gas Spec,  Gas Distribution System    None
3.2.2- Gas Spec,  Gas Facilities    Bottom Connection
3.2.2- Gas Spec,  Gas Facilities    None
3.2.2- Gas Spec,  Gas Facilities    Bottom Connection
3.2.2- Gas Spec,  Gas Facilities    Bottom Connection
3.3.1- Exhaust Specificationbution    MKS (Hot) Capacitance Manometer
3.3.1- Exhaust Specificationbution    MKS (Hot) Capacitance Manometer
3.3.1- Exhaust Specificationbution    MKS (Hot) Capacitance Manometer
3.3.1- Exhaust Specificationbution    CKD-VEC 3"
3.3.1- Exhaust Specificationbution    EDWARDS / iXH-1820T
3.3.1- Exhaust Specificationbution    Customer
3.3.1- Exhaust Specificationbution    Burning Type
3.3.1- Exhaust Specificationbution    EDWARDS / TCS
3.3.1- Exhaust Specificationbution    Customer
3.3.1- Exhaust Specificationbution    No NDU
3.3.1- Exhaust Specificationbution    Customer's Facility Provided
3.3.1- Exhaust Specificationbution    Power Box Top
3.3.1- Exhaust Specificationbution    Customer
3.3.1- Exhaust Specification    N/A
3.3.1- Exhaust Specification    N/A
3.3.1- Exhaust Specification    Standard Type(700mmW)
3.4.1- Reactor Specification    Not Required
3.4.1- Reactor Specification    Customer
3.4.1- Reactor Specification    Customer
3.4.1- Reactor Specification    None
3.4.1- Reactor Specification    61 slots Ladder
3.4.1- Reactor Specification    Quartz
3.4.1- Reactor Specification    Yes
3.4.1- Reactor Specification    Yes
3.4.1- Reactor Specification    Yes
3.4.1- Reactor Specification    HS Plate
3.4.1- Reactor Specification    TEL
3.5.1- Power Specification, Power dist System    480VAC
3.5.1- Power Specification, Power dist System    Star Connection
3.5.1- Power Specification, Power dist System    None
3.5.1- Power Specification, Power dist System    N/A
3.5.1- Power Specification, Power dist System    60Hz
3.5.1- Power Specification, Power dist System    None
3.5.1- Power Specification, Power dist System    N/A
3.5.1- Power Specification, Power dist System    N/A
3.5.1- Power Specification, Power dist System    N/A
3.5.2- Power Specification, Cable Length    Power Box Top
3.5.2- Power Specification, Cable Length    None
3.5.2- Power Specification, Cable Length    30m
3.5.2- Power Specification, Cable Length    30m
3.5.2- Power Specification, Cable Length    30m
3.5.2- Power Specification, Cable Length    30m
3.5.2- Power Specification, Cable Length    N/A
3.5.2- Power Specification, Cable Length    N/A
3.5.2- Power Specification, Cable Length    N/A
3.5.2- Power Specification, Cable Length    N/A
3.5.2- Power Specification, Cable Length    N/A
3.5.2- Power Specification, Cable Length    N/A
3.5.2- Power Specification, Cable Length    Customer
3.5.2- Power Specification, Cable Length    Customer
3.5.2- Power Specification, Cable Length    ???
3.6.1- Interface Specification, Factory Automation System    Comply with GJG
3.6.1- Interface Specification, Factory Automation System    Power Box Top HSMS (10Base-T/100Base-TX)
3.6.1- Interface Specification, Factory Automation System    Yes
3.6.1- Interface Specification, Factory Automation System    Yes
3.6.1- Interface Specification, Factory Automation System    None
3.6.1- Interface Specification, Factory Automation System    None
3.6.1- Interface Specification, Factory Automation System    None
3.6.1- Interface Specification, Factory Automation System    Lower + Upper
3.6.1- Interface Specification, Factory Automation System    FNC Top
3.6.1- Interface Specification, Factory 3.6.1- Interface Specification, Factory Automation System    TEL
3.6.1- Interface Specification, Factory Automation System    Hokuyo / DMS-HB1-Z
3.6.1- Interface Specification, Factory Automation System    RF
3.6.1- Interface Specification, Factory Automation System    Read
3.6.1- Interface Specification, Factory Automation System    Read
3.6.1- Interface Specification, Factory Automation System    Read / Write
3.6.1- Interface Specification, Factory Automation System    Omron / Amp unit: V640-HAM11-V3/ CID RW Controller: V700-L22-6
3.6.1- Interface Specification, Factory Automation System    TEL
3.6.1- Interface Specification, Factory Automation System    Vertical
3.6.1- Interface Specification, Factory Automation System    None
3.6.1- Interface Specification, Factory Automation System    PT / WATER
3.6.2- Interface Specification, User Interface    LCE Series
3.6.2- Interface Specification, User Interface    Signal Tower Colors (from the Top), Red/Blue/Yellow/Green
3.6.2- Interface Specification, User Interface    Front for 10 Stocker (Left)
3.6.2- Interface Specification, User Interface    Yes
3.6.2- Interface Specification, User Interface    Gas Box & Front Operation Panel Installed
3.6.2- Interface Specification, User Interface    Yes
3.6.2- Interface Specification, User Interface    See production specification
3.6.2- Interface Specification, User Interface    Operator Access / White Cover with Orange Light
3.6.2- Interface Specification, User Interface    MPa / KPa
3.6.2- Interface Specification, User Interface    Pa
3.6.2- Interface Specification, User Interface    Optional English or Japanese
3.7.1- Other Specification, Unit Location    Main-Fab
3.7.1- Other Specification, Unit Location    Sub-Fab
3.7.1- Other Specification, Unit Location    Sub-Fab
3.7.1- Other Specification, Unit Location    Sub-Fab
3.7.1- Other Specification, Unit Location    N/A
3.7.1- Other Specification, Unit Location    N/A
3.7.1- Other Specification, Unit Location    N/A
3.7.1- Other Specification, Unit Location    N/A
3.7.1- Other Specification, Unit Location    Sub-Fab
3.7.1- Other Specification, Unit Location    None
3.7.1- Other Specification, Unit Location    Gas Detector Box will be installed in the ceiling of Exhaust Box
3.7.1- Other Specification, Unit Location    N/A
3.7.2 -  Other Specification, Gas Leak Detector    YES
3.7.2 -  Other Specification, Gas Leak Detector    TEL
3.7.2 -  Other Specification, Gas Leak Detector    Riken
3.7.2 -  Other Specification, Gas Leak Detector    Customer's Facility Provided
3.7.2 -  Other Specification, Gas Leak Detector    F2 / Gas Box
3.7.2 -  Other Specification, Gas Leak Detector    HF / Gas Box
3.7.2 -  Other Specification, Gas Leak Detector    DCS / Gas Box
3.7.2 -  Other Specification, Gas Leak Detector    NH3 / Box
3.7.2 -  Other Specification, Gas Leak Detector    TEOS / Box
3.7.2 -  Other Specification, Gas Leak Detector    N2O / Box
3.7.2 -  Other Specification, Gas Leak Detector    None
    3 points
3.7.2 -  Other Specification, Gas Leak Detector    8 points (4 pairs)
3.7.3- Other Specification, Document    Unit of process
3.7.3- Other Specification, Document    0
3.7.3- Other Specification, Document    English Manuals CDROM with OEM=2 set
3.7.3- Other Specification, Document    Cleanroom Paper 0 (English), Standard Paper 1 (English), without OEM Manual
3.7.3- Other Specification, Document    Unit of process
3.7.3- Other Specification, Document    0
3.7.3- Other Specification, Document    1 set
3.7.3- Other Specification, Document    Cleanroom Paper 1 (English), Standard Paper 1 (English)
4.0.1- Fixture List, Furnace    1
4.0.1- Fixture List, Furnace    1
4.0.1- Fixture List, Furnace    0
4.0.1- Fixture List, Furnace    1
4.0.3 - Fixture List, Gas    1
4.0.3 - Fixture List, Gas    1
4.0.3 - Fixture List, Gas    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Reactor    1
4.04 - Fixture List Interface Tool    1
4.04 - Fixture List Interface Tool    1
4.0.4 - Fixture List, Interface Tool    0
4.0.4 - Fixture List, Interface Tool    0
4.0.4 - Fixture List, Interface Tool    0
4.0.4 - Fixture List, Interface Tool    0
7.0- Attached List    2892-128322-11
7.0- Attached List    Drawing: 3892-226454-12 REV. A
7.0- Attached List    3898-b22529-12
7.11.1- Quartz List, Main Quartz Parts    3805-120034-B4
7.11.1- Quartz List, Main Quartz Parts    3805-120042-B1
7.11.1- Quartz List, Main Quartz Parts    3805-120179-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-320070-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-320013-12
7.11.1- Quartz List, Sub Quartz Parts    3805-320072-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-320066-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-320165-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-420016-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-420027-B2
7.11.1- Quartz List, Sub Quartz Parts    3805-420031-B2
7.11.1- Quartz List, Sub Quartz Parts    3805-420030-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-120137-B1
7.11.1- Quartz List, Sub Quartz Parts    3805-320151-B2
7.11.1- Quartz List, Sub Quartz Parts    3805-320152-B3
7.11.1- Quartz List, Sub Quartz Parts    3805-220168-B1
Gas Layout Drawing Parts List    NX1, V11, XF11, D11, M11, O11, J11
Gas Layout Drawing Parts List    T11
Gas Layout Drawing Parts List    NX1,V11, M11, O11, J11
Gas Layout Drawing Parts List    XF11
Gas Layout Drawing Parts List    NX2
Gas Layout Drawing Parts List    N12, D12, M12, Z12
Gas Layout Drawing Parts List    NX, V1
Gas Layout Drawing Parts List    D1
Gas Layout Drawing Parts List    NY, M1, O1, J1
Gas Layout Drawing Parts List    NX, NY, V1, D1, M1, O1, J1
Gas Layout Drawing Parts List    XF1
Gas Layout Drawing Parts List    NX
Gas Layout Drawing Parts List    NY
Gas Layout Drawing Parts List    N1
Gas Layout Drawing Parts List    V1
Gas Layout Drawing Parts List    XF1
Gas Layout Drawing Parts List    D1
Gas Layout Drawing Parts List    M1
Gas Layout Drawing Parts List    
Gas Layout Drawing Parts List    O1
Gas Layout Drawing Parts List    J1
Gas Layout Drawing Parts List    NNY, NV1, NXF1
Gas Layout Drawing Parts List    NX1, NX2
Gas Layout Drawing Parts List    N11, O12, J12
Gas Layout Drawing Parts List    NY1-3
Gas Layout Drawing Parts List    NX9
Gas Layout Drawing Parts List    XF1R-1V
Gas Layout Drawing Parts List    XF11-13, V11-13
Gas Layout Drawing Parts List    D11-13, M11-13, O11-13, J11-13
    
Gas Layout Drawing Parts List    V13, XF13, D13, M13, O13, J13
Gas Layout Drawing Parts List    LSC-F510
Gas Layout Drawing Parts List    T1
Gas Layout Drawing Parts List    T1
Gas Layout Drawing Parts List    NG1~4, 6,7
Gas Layout Drawing Parts List    NG5
Gas Layout Drawing Parts List    NP2~4, 6, 7
Gas Layout Drawing Parts List    NP5
Gas Layout Drawing Parts List    VC1
Gas Layout Drawing Parts List    NG1~4, 6,7
Gas Layout Drawing Parts List    NG5
Gas Layout Drawing Parts List    XF12
Gas Layout Drawing Parts List    NR1, 2
Gas Layout Drawing Parts List    NR1, 2
Gas Layout Drawing Parts List    NR11, 12-1, 12-2
Gas Layout Drawing Parts List    HV1, 2
Gas Layout Drawing Parts List    IV1
Gas Layout Drawing Parts List    IV7
Gas Layout Drawing Parts List    IV2
Gas Layout Drawing Parts List    VV1, VV2
Gas Layout Drawing Parts List    SSV1
Gas Layout Drawing Parts List    MVC1
Gas Layout Drawing Parts List    MVC2
Gas Layout Drawing Parts List    NB2
Gas Layout Drawing Parts List    NV1
Gas Layout Drawing Parts List    CV1
Gas Layout Drawing Parts List    MV
Gas Layout Drawing Parts List    VG1
Gas Layout Drawing Parts List    VG2
Gas Layout Drawing Parts List    P.SW21
Gas Layout Drawing Parts List    VG3
Gas Layout Drawing Parts List    ATM-P.SW11
Gas Layout Drawing Parts List    NB
Gas Layout Drawing Parts List    M. B. P/D. P.
Gas Layout Drawing Parts List    BV21, 22
Gas Layout Drawing Parts List    BV23
Gas Layout Drawing Parts List    RG21, 22
Gas Layout Drawing Parts List    RG23
Gas Layout Drawing Parts List    PG21, 22
Gas Layout Drawing Parts List    PG23
Gas Layout Drawing Parts List    FCNL1-LA1., LA2
Gas Layout Drawing Parts List    NFA, NFB
Gas Layout Drawing Parts List    "PB1-NVNFA
PB1-NVNFB"
Gas Layout Drawing Parts List    FNL12
Gas Layout Drawing Parts List    F21, F22
Gas Layout Drawing Parts List    CV21
Gas Layout Drawing Parts List    BV274, 25, 26
Gas Layout Drawing Parts List    RG24-25-26
Gas Layout Drawing Parts List    P.SW1, P.SW2
Gas Layout Drawing Parts List    FLOW METER

Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps not included on sales

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