Tokyo Electron Ltd. ALPHA-303i Nitride

Equipment details:

Date of Manufacture: 2009

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: NITR

Tool config is based on original PO, please verify tool details at tool inspection

System, General Specification

Safety Specification: SEMI S2-0706/CE

Shipping Area: ASIA

Host Communications: Comply with GJG

PIO I/F Connection: FNC Top

Automated Material Handling system: OHT

PGV Operation: None

Equipment Host I/F connection: Gas Box Top

Group Controller : AGC

External I/F: See External Input/Out table

FTP: None

WAVES Version: Ver 2.13 (WAVES)

Indicator: See customer Detail

Process Pressure : Low pressure

Process Temperature: 750

"Heater type: Mid-Temp. VMM-56-002 5Zone/500~1000c"

N2 Purge system: Installed

Boat Operation : 2 boats type

Carrier ID Reader Writer Type: RF(OP)

Maker/model: OMROM/V700-L21

Provider: TEL

Warning Label: English

Temperature controller: Furnace Temperature Controller, Model 560A Phase

Gas Distribution System

Basic Style: Integrated Gas System (STD)

Tubing : Stainless steel/ Electrical-polish (STD)

Tubing bends: Bend (Less than 90c)

Tube Heating (Include vacuum Line): Use

Manual valve: Fujikin

Air-Operation Valve: Fujikin

Filter: MYKROLIS(Ni)

Regulator: CKD

MFC (Gas panel): HORIBA STEC/DIGITAL

Press. Transducer: NAGANO

System, Factory Automation

Soft Backfill Injector: Installed(OP)

Manifold Heater: NO used

Liquid Source Vapor System: None

Liquid Source auto backfill: None (STD)

Auto-Refill Tubing interconnect by: N/A

Auto-Refill Provide By: N/A

Gas System Schem.Dwg / Parts List: 2192-352085-01*

Vacuum system

Vacuum exhaust system: 3inch pipe

Pump: 1800HTX

Pump Provided by: Edwards

N2 Gas panel for pump provide by: TEL

Pump FNC Vac provide by: Customer (STD)

Vacuum Pressure controller: CKD VEC

"Vacuum gauge-Pressure ctrl: MKS(HOT)Capacitance

Manometer"

"Vacuum gauge-Press Monitor-133kpa: MKS(HOT)Capacitance

Manometer"

Main Valve: CKD-VEC

Trap: Pipe trap

Wafer/Carrier Handling

Wafer Type: 300 SEMI STD-Notch

Wafer Notch Aligner: Installed (OP)

Carrier Type: FOUP / 25slots (SEMI STD)

Carrier Maker/ Type: Entegris/AF3CWAB20BUAFW

Carrier Storage Qty: 16

W/T Wafer I/F speed (U/D): Standard 

Fork Type/ Material: 1+4 Edge Grip/ A12O3 (STD)

Wafer Loading/ Unloading Sequence: ED -> P -> M / M ->P ->ED

Cap Heater: Use

Boat / Pedestal

Qty.of Production Wafers: 100pcs

Boat Material: SiC

Boat Type: 141Slots loader

Boat Rotation: Installed

Pedestal Type: Quartz

Process Tube

Outer/Inner Tube Material: Quartz+Quartz

Liner Tube: Straight

Process Tube: Outer tube interior wall type(For CVD)

Tube Sealing: O-ring seal 

System Controls

System Controller: WAVES

Front Operation Panel: Installed(OP)

Front MMI and Gas Flowchart: Installed

Signal Tower/ Close: Installed/4 colors

General Pressure Display Unit: Pressure-Mpa/Vac-Torr

Gas Cabinet Exhaust Display Unit: SI (Pa)

Furnace Temperature Controller: M560A Phase

Gas Leak Detection

Gas Detection Provided By: TEL

Gas Detection System Maker: Riken

Detected Gas 1/ Point: NH3-Gas box

Detected Gas 2/ Point: SiH2CL2-Gas box

Facility Elect. Equip. Pwr Input

Voltage 3 phase: 208VAC

Voltage 1 phase: 120VAC

Control Power UPS provided by: Customer

Ctrl Pwr UPS make/ model: Fab-wid system

UPS Input Voltage/ Output Voltage: N/A

Power Input Entrance Location: Power Box Top

Unit Location

Power Box: Downstairs

Rapid Cooling Unit: Not installed

UPS Input Voltage/ Output Voltage: Not installed

Pump Unit: Downstairs

Gas Layout Drawing Parts List

HAND VALVE: HV1~10

HAND VALVE: HV11-15

FILTER: F1,6,7

FILTER: F2~5,8,9

REGULATOR: RG1

REGULATOR: RG2,5,6

PRESSURE TRANSDUCER: PT1~7

DIGITAL PANEL METER: PT1~7

MASS FLOW CONTROLLER: MFC-NR

MASS FLOW CONTROLLER: MFC-NX,N1

MASS FLOW CONTROLLER: MFC-NY,N3

MASS FLOW CONTROLLER: MFC-N2

MASS FLOW CONTROLLER: MFC-M1

MASS FLOW CONTROLLER: MFC-M2

MASS FLOW CONTROLLER: MFC-D1

MASS FLOW CONTROLLER: MFC-J1

MASS FLOW METER: MFM-D1

AIR OPERATION VALVE: NX2,N12

AIR OPERATION VALVE: NY2,N22,32,NR2

AIR OPERATION VALVE: M11,21,D11,Z11,Z21,J11 WITH P.S

AIR OPERATION VALVE: M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14

AIR OPERATION VALVE: M15,25,D15,Z15,Z25,J15WITH P.S

CHECK VALVE: CV1,9,13,17

CHECK VALVE: CV2

CHECK VALVE: CV21

CHECK VALVE: CV3,6

CHECK VALVE: CV10,14,18

CHECK VALVE: CV22

CHECK VALVE: CV5,8,12,16,20,24

CHECK VALVE: CV4,7

CHECK VALVE: CV11,15,19

CHECK VALVE: CV23

REGULATOR UNIT: RG7,BV1

REGULATOR UNIT: RG8,BV2

REGULATOR UNIT: RG9

PRESSURE SWITCH: P.SW1,2,14

FILTER: F10

AIR OPERATION VALVE: NR3

ORIFICE: OF1

AIR OPERATION VALVE: IV1 WITH P.S

AIR OPERATION VALVE: IV7 WITH P.S

AIR OPERATION VALVE: IV2 WITH P.S

AIR OPERATION VALVE: VV1 WITH P.S

AIR OPERATION VALVE: VV2 WITH P.S

CYCLDER VALVE: MV

NEEDLE VALVE: NV2

CHECK VALVE: CV25

CAPACITANCE MANOMETER: VG1

CAPACITANCE MANOMETER: VG2

CAPACITANCE MANOMETER: VG3

PRESSURE SWITCH: P.SW11

DRY PUMP UNIT: MBP/DP

BALL VALVE: B21

FILTER: F21-22

REGULATOR : RG21-22

PRESSURE GAUGE: PG21-22

FLOW CONTROL SYSTEM: NL,LA1,2

FLOW METER: FM NFS,NFA

AIR OPERATION VALVE: LA3,PB1

BALL VALVE: BV22

REGULATOR: RG23

PRESSURE SWITCH: P.SW21

FILTER: F423,24

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales