Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2009
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan City, Taiwan
Available date: Currently Available
Process: NITR
Tool config is based on original PO, please verify tool details at tool inspection
System, General Specification
Safety Specification: SEMI S2-0706/CE
Shipping Area: ASIA
Host Communications: Comply with GJG
PIO I/F Connection: FNC Top
Automated Material Handling system: OHT
PGV Operation: None
Equipment Host I/F connection: Gas Box Top
Group Controller : AGC
External I/F: See External Input/Out table
FTP: None
WAVES Version: Ver 2.13 (WAVES)
Indicator: See customer Detail
Process Pressure : Low pressure
Process Temperature: 750
"Heater type: Mid-Temp. VMM-56-002 5Zone/500~1000c"
N2 Purge system: Installed
Boat Operation : 2 boats type
Carrier ID Reader Writer Type: RF(OP)
Maker/model: OMROM/V700-L21
Provider: TEL
Warning Label: English
Temperature controller: Furnace Temperature Controller, Model 560A Phase
Gas Distribution System
Basic Style: Integrated Gas System (STD)
Tubing : Stainless steel/ Electrical-polish (STD)
Tubing bends: Bend (Less than 90c)
Tube Heating (Include vacuum Line): Use
Manual valve: Fujikin
Air-Operation Valve: Fujikin
Filter: MYKROLIS(Ni)
Regulator: CKD
MFC (Gas panel): HORIBA STEC/DIGITAL
Press. Transducer: NAGANO
System, Factory Automation
Soft Backfill Injector: Installed(OP)
Manifold Heater: NO used
Liquid Source Vapor System: None
Liquid Source auto backfill: None (STD)
Auto-Refill Tubing interconnect by: N/A
Auto-Refill Provide By: N/A
Gas System Schem.Dwg / Parts List: 2192-352085-01*
Vacuum system
Vacuum exhaust system: 3inch pipe
Pump: 1800HTX
Pump Provided by: Edwards
N2 Gas panel for pump provide by: TEL
Pump FNC Vac provide by: Customer (STD)
Vacuum Pressure controller: CKD VEC
"Vacuum gauge-Pressure ctrl: MKS(HOT)Capacitance
Manometer"
"Vacuum gauge-Press Monitor-133kpa: MKS(HOT)Capacitance
Manometer"
Main Valve: CKD-VEC
Trap: Pipe trap
Wafer/Carrier Handling
Wafer Type: 300 SEMI STD-Notch
Wafer Notch Aligner: Installed (OP)
Carrier Type: FOUP / 25slots (SEMI STD)
Carrier Maker/ Type: Entegris/AF3CWAB20BUAFW
Carrier Storage Qty: 16
W/T Wafer I/F speed (U/D): Standard
Fork Type/ Material: 1+4 Edge Grip/ A12O3 (STD)
Wafer Loading/ Unloading Sequence: ED -> P -> M / M ->P ->ED
Cap Heater: Use
Boat / Pedestal
Qty.of Production Wafers: 100pcs
Boat Material: SiC
Boat Type: 141Slots loader
Boat Rotation: Installed
Pedestal Type: Quartz
Process Tube
Outer/Inner Tube Material: Quartz+Quartz
Liner Tube: Straight
Process Tube: Outer tube interior wall type(For CVD)
Tube Sealing: O-ring seal
System Controls
System Controller: WAVES
Front Operation Panel: Installed(OP)
Front MMI and Gas Flowchart: Installed
Signal Tower/ Close: Installed/4 colors
General Pressure Display Unit: Pressure-Mpa/Vac-Torr
Gas Cabinet Exhaust Display Unit: SI (Pa)
Furnace Temperature Controller: M560A Phase
Gas Leak Detection
Gas Detection Provided By: TEL
Gas Detection System Maker: Riken
Detected Gas 1/ Point: NH3-Gas box
Detected Gas 2/ Point: SiH2CL2-Gas box
Facility Elect. Equip. Pwr Input
Voltage 3 phase: 208VAC
Voltage 1 phase: 120VAC
Control Power UPS provided by: Customer
Ctrl Pwr UPS make/ model: Fab-wid system
UPS Input Voltage/ Output Voltage: N/A
Power Input Entrance Location: Power Box Top
Unit Location
Power Box: Downstairs
Rapid Cooling Unit: Not installed
UPS Input Voltage/ Output Voltage: Not installed
Pump Unit: Downstairs
Gas Layout Drawing Parts List
HAND VALVE: HV1~10
HAND VALVE: HV11-15
FILTER: F1,6,7
FILTER: F2~5,8,9
REGULATOR: RG1
REGULATOR: RG2,5,6
PRESSURE TRANSDUCER: PT1~7
DIGITAL PANEL METER: PT1~7
MASS FLOW CONTROLLER: MFC-NR
MASS FLOW CONTROLLER: MFC-NX,N1
MASS FLOW CONTROLLER: MFC-NY,N3
MASS FLOW CONTROLLER: MFC-N2
MASS FLOW CONTROLLER: MFC-M1
MASS FLOW CONTROLLER: MFC-M2
MASS FLOW CONTROLLER: MFC-D1
MASS FLOW CONTROLLER: MFC-J1
MASS FLOW METER: MFM-D1
AIR OPERATION VALVE: NX2,N12
AIR OPERATION VALVE: NY2,N22,32,NR2
AIR OPERATION VALVE: M11,21,D11,Z11,Z21,J11 WITH P.S
AIR OPERATION VALVE: M12-14,22-24,D12-14,Z12-14,Z22-24,J12-14
AIR OPERATION VALVE: M15,25,D15,Z15,Z25,J15WITH P.S
CHECK VALVE: CV1,9,13,17
CHECK VALVE: CV2
CHECK VALVE: CV21
CHECK VALVE: CV3,6
CHECK VALVE: CV10,14,18
CHECK VALVE: CV22
CHECK VALVE: CV5,8,12,16,20,24
CHECK VALVE: CV4,7
CHECK VALVE: CV11,15,19
CHECK VALVE: CV23
REGULATOR UNIT: RG7,BV1
REGULATOR UNIT: RG8,BV2
REGULATOR UNIT: RG9
PRESSURE SWITCH: P.SW1,2,14
FILTER: F10
AIR OPERATION VALVE: NR3
ORIFICE: OF1
AIR OPERATION VALVE: IV1 WITH P.S
AIR OPERATION VALVE: IV7 WITH P.S
AIR OPERATION VALVE: IV2 WITH P.S
AIR OPERATION VALVE: VV1 WITH P.S
AIR OPERATION VALVE: VV2 WITH P.S
CYCLDER VALVE: MV
NEEDLE VALVE: NV2
CHECK VALVE: CV25
CAPACITANCE MANOMETER: VG1
CAPACITANCE MANOMETER: VG2
CAPACITANCE MANOMETER: VG3
PRESSURE SWITCH: P.SW11
DRY PUMP UNIT: MBP/DP
BALL VALVE: B21
FILTER: F21-22
REGULATOR : RG21-22
PRESSURE GAUGE: PG21-22
FLOW CONTROL SYSTEM: NL,LA1,2
FLOW METER: FM NFS,NFA
AIR OPERATION VALVE: LA3,PB1
BALL VALVE: BV22
REGULATOR: RG23
PRESSURE SWITCH: P.SW21
FILTER: F423,24
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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