Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Tokyo Electron Ltd. TELINDY Plus IRAD Oxide

Asset ID: 204527

Print spec sheet

Tokyo Electron Ltd.

TELINDY Plus IRAD Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

Configuration :

Software Version : Ver.6.07

System Controller is Model 780

The last PM date is 2016/09/24

Off-line date is 2017/11/06

Can produce wafers as is

All cables are present

Platform Type is TELINDY PLUS I-RAD

Process Type is Gate Oxide/SiO2

Temperature Range is Mid Temp 500-800 C


Wafer Handling :

Wafer Type is 300 mm

Carrier Type is 25 slot

Carrier Stage Capacity is special

WTU Type is 1+4 Edge Grip

Production Wafers qty are 100

Boat Operation is 1 Boat Type


Gas Panel Configuration :

MFD Make is ADVANCED ENERGY

Gas MFC Model MFC Size

N2 MFC-NX 50 SLM

O2 MFC-O1 20 SLM

HF MFC-XF1 5 SLM

N2 MFC-N1 10 SLM

N2 MFC-N2 10 SLM

N2 MFC-N3 5 SLM

N2 MFC-N4 10 SLM

N2 MFC-NL 1000 SLM

N2 MFC-NBS 400 SLM

N2 MFC-NR 500 SCCM


Reactor Configuration :

Quartz Material is Electric Fused

Quartz Provide is TEL

Process TUBE is I Red TUBE

TUBE Sealing is special O-ring

Boat Type is 117 slot

Boat Material is Quartz

Pedestal Type is Quartz

Auto shutter is shutter purge type

Edwards-IXH3030T Vacuum pump is included








Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.