Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Kokusai Electric Co., Ltd Quixace II Nitride

Asset ID: 195213

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Kokusai Electric Co., Ltd

Quixace II Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: October 9, 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


Tool Model : QUIXACE (DJ-1206V-DF)

Process: LP SiN


Tube Material:Quartz(Outer),SiC(Inner)

Boat Material:SiC

Production wafes:125

Process Gas:SiH2Cl2(F.S:0.5SLM)

NH3(F.S:1SLM*2Line)

MFC Maker:STEC

MFC Model:Z500series

Process Temp:700-800deg

DP Maker:Edwards

DP Model:iH1800HTF

Pressure Control:APC Valve


Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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