Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: Jul. 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool is operating in clean room.
When a main body unit of the tool is shipped from Fab15 to a warehouse, a Power box, a RCU and an O3 generator of the tool will be removed from tool. (They will be missing parts.)
Other missing or damaged parts: Checking with Fab15.
A Gas Box will be detached from the main body unit at de-installation for equipment move out.
Tube Material:Quartz
Boat Material:Quartz
Production wafes:50
Pressure control:APC Valve
Process Gas:ZAC(F.S:0.5sccm×２),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANE
Vaporizer Maker:STEC(TMA,ZAC)
Vaporizer TYPE:LSC-F530(TMA),TL-2014(ZAC)×２ （Dual Vaporizer)
MFC Maker:STEC
MFC Model:Z500series
Process Temp:200-300deg
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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