Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: Jul. 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
A Power box, a RCU, an O3 generator and Gas Box are stored with the tool in the warehouse but the O3 generator is not included in tool for the tool's sale.
There are no missing or damaged parts.
Fab15's shipping kits have been installed on an EXHAUST-BOX unit only of the tool for the equipment rigging. The Fab115's shipping kits need to return to Fab15.
Tube Material:Quartz
Boat Material:Quartz
Production wafes:50
Pressure control:APC Valve
Process Gas:ZAC(F.S:0.5sccm×２),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANE
Vaporizer Maker:STEC(TMA,ZAC)
Vaporizer TYPE:LSC-F530(TMA),TL-2014(ZAC)×２ （Dual Vaporizer)
MFC Maker:STEC
MFC Model:Z500series
Process Temp:200-300deg
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
