Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Ebara FREX300S Tungsten

Asset ID: 209923

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Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2006.10

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 8/12/2022


Full system configuration available: Please ask your sales person.

Photos are available: Please ask your sales person.


RowParent CompntPart DescriptionDetailed DescriptionQtyMfg Part
1Base SystemFrex 300S4 head 4 platenpolishing system. Dry in Dry out1 
2Nova 3090 Next ReadyInsitu Metrology System1 
3Monitor 1 LocationFront of tool1 
4Monitor 2 LocationCleaner Side of tool1 
5Monitor 3 LocationCart Mounted on Polishing Side of tool1 
6Front Light Tower locationLeft Side1 
7Rear Light Tower locationRight Side1 
8SoftwareHMIHuman / Machine Interface1Version 8.2
9Endpoint Simulation SoftwareME-201Version 2.4.28.A
10Simulator Software KeyOne Key supplied1 
11NOVA Interface softwareVia File Server1Version 4.5r6b65
12Factory InterfaceWIP Delivery TypeOHT or manual delivery1 
13CarrierEntegris F3001 
14E84 PI O Sensors and CablesUPPER E84 Sensors & Cables, with E87 compliance1 
15E99 Carrier IDSemi ver 0101041 
16Docked E99 Reading CapabilityFOUP Reader1 
17Frame ConfigurationMetro ready right side of mini-environment1 
18Load Port TypesSemi Compliant MENV and FIMS Assmeblies3 
19Load Port Operator InterfaceStandard1 
20Operator Access SwitchYes1 
21Platen APlaten TypeCeramic (SiC), 10-150 RPM1 
22Platen PadFor shipment only1 
23Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
24Platen End pointRECM & Friction1 
25Platen Insitu metrologyInsitu metrology0 
26Slurry DeliveryInjecter + HIC1 
27Line 150-500ml/min1 
28Line 250-500ml/min1 
29Line 3-1 
30Dresser DIW flow meter.Flow meter1 
31Platen Cooling Flow MonitorInstalled on the platen cooling return line.1 
32Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1 
33Platen BPlaten TypeCeramic (SiC), 10-150 RPM1 
34Platen PadFor shipment only1 
35Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
36Platen End pointRECM & Friction1 
37Platen Insitu metrologyInsitu metrology0 
38Slurry DeliveryInjecter + HIC1 
39Line 150-500ml/min1 
40Line 250-500ml/min1 
41Line 3-1 
42Dresser DIW flow meter.Flow meter1 
43Platen Cooling Flow MonitorInstalled on the platen cooling return line.1 
44Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1 
45Platen CPlaten TypeCeramic (SiC), 10-150 RPM1 
46Platen PadFor shipment only1 
47Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
48Platen End pointRECM & Friction1 
49Platen Insitu metrologyInsitu metrology0 
50Slurry DeliveryInjecter + HIC1 
51Line 150-500ml/min1 
52Line 250-500ml/min1 
53Line 3-1 
54Dresser DIW flow meter.Flow meter with user configurable alarm settings.1 
55Platen Cooling Flow MonitorInstalled on the platen cooling return line.1 
56Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1 
57Platen DPlaten TypeCeramic (SiC), 10-150 RPM1 
58Platen PadFor shipment only1 
59Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
60Platen End pointRECM & Friction1 
61Platen Insitu metrologyInsitu metrology0 
62Slurry DeliveryInjecter + HIC1 
63Line 150-500ml/min1 
64Line 250-500ml/min1 
65Line 3-1 
66Dresser DIW flow meter.Flow meter1 
67Platen Cooling Flow MonitorInstalled on the platen cooling return line.1 
68Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.1 
69PolisherPolisher TechnologySlurry and Pad1 
70Polishing Head300mm AI Head Generation 1 
71Pad Wafer Loss SensorLaser type1 
72Atomizer/Spray BarEbara to provide bracket and atomizer bar.1 
73AI head flanges pinsSolid pin1 
74Cleaner ModuleSpecial ChemicalSingle chemical bulk line that will service all modules.1 
75Cleaner Module 1Roll Roll Cleaner TypeRoll Brush1 
76Chemical 1 Upper Control ValveRecipe settable flow1 
77Chemical 1 Lower Control ValveRecipe settable flow1 
78Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
79Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
80Special Chemical UpperNeedle valve1 
81Special Chemical LowerNeedle valve1 
82Special Chemical UpperFlow Meter with user configurable alarm settings.1 
83Special Chemical LowerFlow Meter with user configurable alarm settings.1 
84MegasonicNozzle1 
85Bevel Edge CleaningYes1 
86Cleaner Module 2Roll Roll Cleaner TypeRoll Brush1 
87Chemical 1 Upper Control ValveRecipe settable flow1 
88Chemical 1 Lower Control ValveRecipe settable flow1 
89Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
90Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
91Special Chemical UpperNeedle valve1 
92Special Chemical LowerNeedle valve1 
93Special Chemical UpperFlow Meter with user configurable alarm settings.1 
94Special Chemical LowerFlow Meter with user configurable alarm settings.1 
95MegasonicNo0 
96Bevel Edge CleaningNo0 
97Cleaner Module 3Cleaner Type2FJ1 
98Chemical 1 Upper Control ValveRecipe settable flow1 
99Chemical 1 Lower Control ValveRecipe settable flow1 
100Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
101Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
102Special Chemical UpperNeedle valve1 
103Special Chemical LowerNeedle valve1 
104Special Chemical UpperFlow Meter with user configurable alarm settings.1 
105Special Chemical LowerFlow Meter with user configurable alarm settings.1 
106MegasonicNo0 
107Bevel Edge CleaningNo0 
108SRDSpin Rinse DryerYes1 
109Safety PrecautionsFM4910 Compliant> 97% by weight FM 4910 approved materials of construction.1 
110EPOTwist to release1 
111Safety labelsEnglish1 
112Secondary ContainmentAll mechanical connections1 
113FacilitiesInstallation TypeNot through the wall0 
114Seismic supportSeismic support points listed1 
115Chemical ConnectionBottom1 
116Exhaust ConnectionTop1 
117Gas ConnectionBottom1 
118Drain ConnectionBottom1 
119Bulk Supply RegulationPont of use regulation for special chemical supply line.1 
120External PenetrationsBulkhead fitting for inert gas1 
121External PenetrationsDual containment for liquids1 
122ChillerCommunication interface1 
123MetrologyNova Interface requirementsFunctional interface in include wafer transfer and data exportation to buyer host1 
124DocumentationOperations ManualsCD ROM1 
125Maintenance ManualsCD ROM1 
126Electrical DiagramsCD ROM1 
127Plumbing DiagramsCD ROM1 
128OEM parts manualsCD ROM1 
129DocumentationLaserRequired class II documentation1 
130Additional OptionsMetal Contact CountermeasuresAppropriate covers to reduce possibility of enviromental contamination1 


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