Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Plasma System Corp. DES-220

Asset ID: 55277

Print spec sheet

Plasma System Corp.

DES-220

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Hsinchu 300, Taiwan

Available date: Currently Available


Inspect to confirm configuration and condition.

Date of Last PM : 17th Dec 2015

System is not On-Line

Off-Line Date (if applicable) is June 2016

All Cables are present

Handler Type : Lifter

# of Cassette / FOUP Loaders : 4

No pre-aligner

Communication Interface is SECS

Facility Requirements :

CDA : 5-7 Kg/ cm2

DIW : 75 PsiG/min

Vacuum : Φ150mm 4M / min

Gas : 2 – 4 Kg/ cm2

Power : 208V 60Hz 304W 150A

The Quartz tube*2 / Quartz boat*2 / Matcher*2 / Screen*3 / ISO*2 / Throttle valve*2 / Lifter arm*1 / PLC CV1000*2 may have been missing or damaging.

Not include the Asyst LPT 2200 SMIF loader*2.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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