Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2015-01-05
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 11/15/2024
Process: BACKETCH
Tool config is based on original PO, please verify tool details at tool inspection
FID: 157426
Tool S/N: E14
Reference Tool S/N: E6
EOS Product Type
EOS Front Section ES
EOS Rear Section ES
Front End Load Port: 4 FOUP TDK
Carrier ID: Brooks Carrier ID reader
Factory Automation: OHT PIO Sensor
User Interface Options: Side Only (Ballroom)
Signal Tower: R-O-G-B Silm Line
Handling system: Standard Handling
Process Module Ionization: PM Ionixation 16 chamber
Platform Doors: Door with Windows
Okatform Lights: Wite LEDs
Number of Power Supply Lines: 2 Supply Feed
System Power Supply: 208V and 480V 50/60 Hz
Interconnect Com. Cables: 30m Cab;es to Subpanel
PC Power supply: Internal UPS
Fire Suppression
Front Section & Rear Section
EOS ES Media#1
Chemistry 1: dHF (supply to TL)
Chemistry 1 Dispense: double side dispense
Chemistry 1 Dispense mode: Drain & recirculation
Chemistry 1 Preparation: 2 Chemical Mix (High Flow) NSR
Chemical 1 Temperature Mixing: Not Present: Local NSR
Chemistry 1 Life Time Exp.: Top-up
Chem. 1 Temp. Specification: 24-40C
Chemical 1 Filter Preparation: Filter Housing
Chem. 1 Gilter Catridge: Filter Pore Size 20nm
Internal Chemical 1 AnalyzersL Horiba HF-960M
External Chemical 1 Analyzers: Not present
Chem 1 Analyzer Saple collerL Not Present
EOS ES Media#2
Chemistry 2: Not present
EOS ES Media#3
Chemistry 3: Not present
EOS ES PM
Chuck: DS Chuck (Std. & Solb. less than 60C)
Drying: ASD3+
IPA Options: Standard
IPA Filter Cartridge: Lam Spplied IPA Filter
Partical Removal Options: A-Jet (DI/CO2)
Drain Separation (Rinse Level): 3 Media
Level 3- Drain#1: Rinse Medua (DI)
Level 3- Drain#2: IPA- High Concentration
Level 30 Drain#3: IPA- Low Concentration
Exhaust Separation: BB-L1 & L2-Exh. 1, Le-Exh1,2
Media 1 Dispense Single Nozzle
Media 2 Dispense: Single Nozzle
OptionsL Continuos Wet Wafer
Damage/Missing parts list
Please inspect tool to reconfirm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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