Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) CLEAN TRACK LITHIUS

Asset ID: 210131

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Tokyo Electron Ltd. (TEL)

CLEAN TRACK LITHIUS

Single Block (Coat/Develop)

Resist Processing Equipment

Equipment details:

Date of Manufacture: 05 / 06

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 2/10/2022

BLOCK DIAGRAM & PHOTOS AVAILABLE.

Fab15 will provide with shipping kits for equipment rigging.


TRACK CONFIG 1:

COT cup:2

Developper cup:3


TRACK CONFIG 2:

Resist Reduction:RRC

Dev Nozzle:SH Nozzle

Resist pump:RDS(10ml)×2

CRD×6


Oven Config:

COT:CLHP x3

PEB:CLHP ×4

Post bake:LHP x4

TAD×2


Track Chemicals:

Resist supply:Gallon bottle

Thinner:OK73

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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