Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Endura II Aluminum Interconnect

Asset ID: 209123

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Applied Materials (AMAT)

Endura II Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 10/7/2022

PVD 15-3AMAT_ENDURA2_REFLOW_01 AMAT ENDURA 2 REFLOW


OEM  AMAT
Tool Model  ENDURA2
Process  Metal (Al)
Software Version (include revision #) eentB4.9_40
System Power Rating  400VAC,3phase STAR
208VAC,3phase STAR
Loading Configuration  3 Load Ports
 Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)  
      
 Part Type  Part Description :Part number:Date of Change:Qty
1XP robot  Transfer XP Robot0010-283142/1/20201
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  SIP-TTNAr/N2 
Chm/Unit Position   2  ALPS-AlAr/N2 
Chm/Unit Position   3  Hot-AlAr/N2 
Chm/Unit Position   4  Hot-AlAr/N2 
Chm/Unit Position   5  SIP-TTNAr/N2 
Chm/Unit Position   E  DegasN2 
Chm/Unit Position   F  DegasN2 
Tool:   
Process Unit:  Model:
Controller:  FES (cPCI)
MFC/Pressure Unit:  AERA DN780
Drive Mechanisms:  NA
FOUP Opener:  TDK (TAS-300)
Gas System:  NA
Exhuast System:  NA


No missing or damaged parts.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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