Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

Tokyo Electron Ltd. Tactras RLSA Poly

Asset ID: 195204

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Tokyo Electron Ltd.

Tactras RLSA Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2012

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Tool is cold down.

Inspect to confirm configuration and condition.

Configuration :

Tool can produce wafers as is.

All cables are present.

Process chamber type is RLSA Polye.

Signal Lamp Tower / Clean Room Manuals / Standard Manuals are included but Remote Service Monitors not included.


Process Kit Part Numbers :

Item Part Number

Vpper Wall 28002

Depo Shield 33005

Vpper Jacket 14014

Lower Jacket 13020

Exhaust Plate 22007

Shutter 32009

Shield(RLSA) Ring AA11OV1

Injector M876V2

Insulator B S320V1

Focus Ring Quartz 25584

Insulator A Quartz 06737

Dielectric Plate Dimple Quartz 34054

Shower Ring Quartz 16691


RLSA Chamber information :

ESC for wafer with Dual He Cooling

Nihon Koshuha Microwave Generator / Model is MKS 050B05 DL-PS


Turbo Pump Details : Position 2 SHIMADZU / Model is FT2301D

Generator Details : Position 2-Lower ADVANCED / Model is PARAMOUNT 3013

Process Chamber Roughing Pump is EDWARDS / Model is IXH30301

Cassette Chamber Pump is EDWARDS / Model is IXL120

Transfer Chamber Pump is EDWARDS / Model is IXL120

Chiller Details : THERMO CHILLER 3MC / Model is HRZ010-WS

Gas Box Configuration :

Gas Line Gas

1 H2

2 CH2F2

3 HBr

4 CL2






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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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