Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Novellus Systems Inc. VECTOR Extreme - PECVD TEOS

Asset ID: 211065

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Novellus Systems Inc.


PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Software Version: 4.1B12

System Power Rating: 120V AC 1-Phase

Loading Configuration: 4 lots loading

Chm Position 1: Extreme PM2, Chemical: TEOS. Gas:Ar/N/O2/He/NF3

Chm Position 2: Extreme PM3, Chemical: TEOS. Gas:Ar/N/O2/He/NF3

Platform type: Vector Extreme

Chamber type: TEOSxT AMP-DS

Process capability: TEOS oxide

Loadport count: 4


Required Software Revisions: 

System software: PECVD_XL_XT_4_1_B12_PATCH.16 Windows 2000

Fixload firmware: 

ATM robot firmware (friction end effector): VORTEX XY5 FW V1.21 REV B B19

Loadlock motion controller firmware: N/A

Vacuum robot firmware: VORTEX VACUUM ROBOT V1.14 REV A B4

Hardware Configuration - Frame: PEXD002

FOUP front end interface: KIT,TDK,LOADPORT,OMRON RFID,WITH MAPPER 04-403919-02

Fixload FOUP RFID reader: FOUP RF ID Reader Omron V640, 04-403939-01

ATM robot end effector (friction type): top: ASSY,EE,12" LWR FRICTION,XY5 GEN2, 02-426996-00; bottom: ASSY,EE,12" UPR FRICTION,XY5 GEN2, 02-426997-00

Loadlock motion controller: N/A

Loadlock to atmosphere valve (VAT L-motion): VALVE,GATE,300MM,PNEU,DUAL ATM,MACH IV, 63-435188-00

Loadlock to chamber valve (SMC valve): VALVE,GATE,300MM,PNEUMATIC,X2,SMC L-MOTI 63-294083-07

Front UI computer: COMPUTER,SERVER,ES2,UNIT1,1U,QNX6,SSD, 63-431069-00

Transfer module robot: ASSY,TM ROBOT,MACH IV, 02-371402-00

Transfer robot end effector: END EFFECTOR,300MM,VAC RBT,MACH IV, 15-418390-00

Transfer module SMC valve: VALVE,GATE,300MM,PNEUMATIC,X2,SMC L-MOTI, 63-294083-07

Transfer module SMC valve gate: GATE,BONDED,300MM,SMC L-MOTION, CHEMRAZ 629 (Transfer module/Chamber), 60-321366-00

Loadlock lift pin servomotor: MOTOR,SMART,24V,2315D-BRKETH,ANIMATICS, 33-317693-00

Transfer chamber throttle valve: MACH IV Valve, Throttle, 50, KF, Ethernet, 60-315377-02

Loadlock vacuum gate valve: VALVE,GATE,300MM,PNEUMATIC,DUAL MONOVAT,MACH IV, 63-459278-00

Loadlock pump isolation valve: Valve, Gate, Loadlock Angle Valve Manifold, 63-312537-00

Mini environment AWC: installed

Loadlock baratrom: MANOMETER,CAPACITANCE,10 TORR,THICK DIAP 60-371204-00

Transfer module baratron: Manometer, 10 T, KF 16, 60-314269-00

FFU filter: none

Hardware Configuration - Chamber: 

Chamber top plate IOC: CNTRLR,EIOC 0,TOP PLATE,AMP-DS,VXT 61-384817-00

Below chamber IOC: CNTRLR,EIOC 1,BELOW CHAMBER,H2O 61-428059-00

Chamber EC controller: COMPUTER,SERVER,ES2,UNIT1,1U,QNX6,HDD 685-151517-101




MACH IV EC controller: COMPUTER,SERVER,ATHENA4,1U 61-381414-00

Showerhead assembly (13"): SHWRHD,300MM,13 IN,3292 HOLES,CLASSIC,60 16-271392-00

Pedestal position 1 & 2: PED ASSY,VACUUM BRAZED,MOVEABLE,9 MCA PI, 02-384123-00

Pedestal position 3 & 4: PED ASSY,VACUUM BRAZED,MOVEABLE,9 MCA PI, 02-384125-00

Captured lift pin assembly: PIN,SAPPHIRE,C3VCTR,CAPTURED, 15-257351-00

Remote plasma clean power supply: GENERATOR,PLASMA SOURCE,400KHZ,HF-S,CDA, 27-324553-00

HFRF generator: GEN,HF,5000W,13.56MHZ,APEX 251,F47+, 27-373073-00

LFRF generator: GEN,LOW FREQUENCY,3000W,400KHZ,PARAMNT-M, 27-444472-00

HFRF match network: RF MATCH,13.56MHZ,5KW,COMET,24V DC, 27-367855-00

LFRF match network: RF MATCH,LF AUTOMATCH,BULLET,COMET, 27-375850-00

Servo spindle: SPINDLE ASSY,COOL,COMMON,303,C3VCTR, 02-400831-00

Pendulum valve assembly (pressure control valve): VALVE,THROTTLE-GATE,DN100,O-RING,PEND,IN, 63-378354-00

AMPDS quad inlet & divert valves: TUBE ASSY,ALD QUAD VALVE MNFLD,AMPDS,VXT, 10-369130-00   

AMPDS mechanical assembly: ASSY,VAPORIZER,MECHANICAL,1LIQ,ROUND,HDR, 02-368441-01

Hot chamber hardware: Installed

MCA sapphire balls: MCA Ball, 22-100613-00

MCA sapphire pins: MCA Saphire Pin, 3/16 Dia X 13/16 Lg, 1 flat end, 15-315136-00

Ring, wafer lift: RING,CARRIER,UPR SPINDLE 15-122178-00

RPC plasma source: GENERATOR,PLASMA SOURCE,400KHZ,HF-S,CDA, 27-324553-00

RPC distribution: LEG,DIST,H2O COOLED,NO VLV,RPC,VXT, 16-377105-00

IR endpoint controller: DETECTOR,INFRARED GAS,SIF4,1M TORR,24VDC, 27-450285-00

SIRF enclosure: ASSY,SIRF,LF BULLET, 02-378987-00

HFRF power supply: PWR SPLY,208VAC,63A,14.6KW,ASTRON HF-S, 27-425479-00

Servo pin lift: Pin Lift Assy, Servo, SM2315D-Brk/Eth, K2, 02-365787-00

Transfer plate: ASSY,TRANSFER PLATE,WIDE GAP, 02-279692-00

Filler plate, station 1: PLATE,FILLER,STATION 1,CHAMBER, 15-315622-01

Filler plate, station 2: PLATE,FILLER,STATION 2,CHAMBER, 15-315622-02

Filler plate, station 3 & 4: PLATE,FILLER,HI-TEMP,VCTR, 15-270984-00

Double bonded gate: VALVE,THROTTLE-GATE,DN100,O-RING,PEND 63-378354-00

Inconel chamber screws: KIT,CHAMBER INTERNAL,TEOSXT,VXT 04-380540-00

Gasbox: KIT,VXT ,GSBX, TEOSXT, PT W/DISPLAYS, RE 845-167146-001

Baratron 1, process module: MKS 627A11TBC (27-10343-00), 10T heated, 27-10343-00

Baratron 2, process module: MKS 750B13TCE2GK, 1000T, 60-378096-00

Gas Panel (part#, gas species, size): 

Line 1: 22-192845-00, O2(H) @ 20 SLM

Line 2: 22-192847-00, Ar(A) @ 10 SLM

Line 3: 22-371279-00, He(A) @ 7 SLM

Line 4: 22-371280-00, O2(L) @ 7 SLM

Line 5: 22-192813-00, He(B) @ 20 SLM

Line 6: empty

Line 7: empty

Line 8: 22-380894-00, O2(B) @ 15 SLM

Line 9: 22-192846-00, NF3 @ 10 SLM

Line A: empty

Line B: 22-380896-00, A (B1) @ 25 SLM

Line C: 22-192847-00, Ar(B2) @ 10 SLM

Line D: 22-192810-00, N2 @ 10 SLM

Line 14: not used

Line 15: not used

Line 16: not used

Line 17: not used

Line 18: not used

Line 19: not used

Line 20: not used

Line 21: not used

Line 22: not used



Damage/Missing parts list

Damage- pendulum valve Qty 1

Damage- spindle index plate finger Qty 4

Damage- AMPDS heater jacket - divert2 Qty 1

Damage- AMPDS heater jacket - smart sock Qty 2

Damage- ALD valve sensor Qty 2

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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