Applied Materials (AMAT) Producer GT APF

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection

Process: AC_SR

Software Version: B5.4.135

System Power Rating: 208 AC 3-Phase

Loading Configuration: 3 SELOP 7 25 WAFER FOUP (LOADPORT)

Chm/Unit Position 1: PE AC_SR GT TWIN CHM A; Chemicals/ Gases Used: C3H6, H2, NH3, HE*2, AR*2, O2, N2

Chm/Unit Position 2: PE AC_SR GT TWIN CHM A; Chemicals/ Gases Used: C3H6, H2, NH3, HE*2, AR*2, O2, N2

Chm/Unit Position 3: PE AC_SR GT TWIN CHM A; Chemicals/ Gases Used: C3H6, H2, NH3, HE*2, AR*2, O2, N2

Technology: DCVD

Platform Type: PRODUCER GT

System software: B5.4.135

FiCGUI: fB5.20_11

GP: 8.10.21.2

DTauMacros: 9.2.44.0

Mainframe Configuration: 

Robot Blades: Ceramic (0200-08346)

LL preheater: 0090-04659

slit valve door: 9992-00594

MF pump: Edwards IH 600

LL pump: Onboard pump BOC EPX Load lock and Transfer chamber shared pump

Diffucer: 4020-00050

Chamber Configuration

Chamber Type: APF-x 

RF Generator: GEN RF 13.56MHZ 3KW 3PHASE 208VAC 2PIN 0920-00139

Heater: 0010-59787

Slit Valve: 9992-00594

RF Filter: 0090-04947

Foreline TV/ISO: 0195-07685(COMBO)

RPS: N/A

Aligner producer GT 5.4 FI: 0240-54030

Pin lifts and integration, common producer SE/GT: 0246-03110

Gas Box: Bypass GAS BOX 0041-28308

Blocker,APF,300mm Producer : 0020-63185

Faceplate,APF,300mm Producer G: 0020-49785

Isolator,Ceramic,CVD Low K,300mm Producer SE/GT: 0200-01427

Assembly,side LC match,left ,2700PF,APF,producer : 0090-06021

Assembly,side LC match,right ,2700PF,APF,producer : 0090-06022

Filler Chamber 1 APF Producer SE/GT: 0040-75150

Filler Chamber 2 APF Producer SE: 0040-75151

Pumping Liner Top Producer SE/GT: 0200-03969

Liner,Ceramic Middle, Producer SE: 0200-02396

Liner,Ceramic Bottom, Producer SE APF: 0200-03414

Big foot lift pin ,300MM,producer SE/GT: 0242-53926

Lift hoop,Pin Lift Fixed floating and big foot,producer SE/GT: 0200-08334

Shadow ring 0.8mm EE W/TAB,min Gap Produce SE: 0200-04086

Output manifold,left single hole ,blocker bypass: 0040-81935

Output manifold,right single hole ,blocker bypass: 0040-81934

Blank off,RPS port bypass output manifold produce: 0021-45732

C-Channel side 1 producer SE APF: 0200-03406

C-Channel side 2 producer SE APF: 0200-03407

Liner Pump Port Inner Producer SE APF: 0021-25807

Sleeve Slit Valve Producer SE/G APF : 0021-25781

Gas Box Configuration

Line 1: N.A

Line 2: C3H6 3SLM

Line 3: H2

Line 4: NH3 5SLM

Line 5: N.A

Line 6: 

Line 7: N.A

Line 8: Ar_Hi 10SLM

Line 9: O2 15SLM

Line 10: N2 10SLM

Line 11: He_hi 3SLM

Line 12: He_Lo 12SLM

Line 13: Ar_Lo 3SLM

Line 14 Gas: N.A

Line 14 Liquid Pos 1: N.A

Line 15: N.A

Line 16: N.A

Line 17 Gas: N.A

Line 17 Liquid Pos 2: N.A

Line 18: N.A

Line 19: N.A

Line 20 Gas: N.A

Line 20 Liquid Pos 3: N.A

Line 21: N.A

Line 22: N.A

Process Pump/Abatement

Pump: EDWARD iH1000

Scrubber: DAS

Kit Parts 

FI aligner : YES

shadow ring : YES

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales