Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch

Tokyo Electron Ltd. Trias Ti/TiN Chamber

Asset ID: 30208

Print spec sheet

Tokyo Electron Ltd.

Trias Ti/TiN Chamber

Parts/Peripherals

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Chamber Only
Chamber Qty 2
TiN (PM3)
Basic System (TEL Trias) Tool ID: DMT102 (ASTRL1T400) - 1 Chamber only
Chamber Position: F16 Warehouse
Chamber Process type: SFD TiN

Gas Supply Config
Manual valve N*: Yes
Regulator (N2-1/N2-2): Yes
Regulator (N2-PF): Yes
Regulator (Ar): Yes
Pressure sensor (All gas line): No
Filter (N2-PF): No
Manual valve (Dry air line): Yes
Filter (Dry air line): No
Regulator (Dry air line): No
Pressure sensor (Dry air line): No
Pressure gauge (Dry air line): No

Chamber TEL TRIAS TIN
1333Pa Manometor: Yes
133kPa Capacitance manometer: Yes
O-rings: Yes
O-rings: Yes
O-rings, Cubic Trap I/O: Yes
Gate Valve (Slit Valve): Yes
APC Valve: Yes
Cubic Trap: Yes
Vacuum valve(VEP1): Yes
Vacuum valve(VEP2,3): Yes
Pressure Gauge, exhaust system: Yes
Flow Meter for cooling water: No
Water Leak Sensor: Yes

Gas Box Configuration
Gas Stick 1: Yes
Gas Stick 2: Yes
Gas Stick 3: Yes
Gas Stick 4: Yes
Gas Stick 5: Yes
Gas Stick 6: Yes
Gas Stick 7: Yes
Gas Stick 8: Yes
DLI: Yes
Heater Bottom Purge: Yes
Air Operation Valves: Yes
Gas Filters: Yes
Regulators: Yes
Gas lockout system: Yes

Kit Parts: 
STAGE HEATER ASSY,ELPR STG HTR Ver2.4: Yes ( Ver2.5)
TiN Shower Base: Yes
"Inludes PLATE SHOWER SPACER 300TIN S1, PLATE SHOWER HEAD 300TIN, BLOCK GAS DIFFUSION, SCREW LONG HEAD M6X15, SCREW M6X28, SPRING WASHER SPAK M6, TUBE GAS INLET 300TIN, WASHER FLAT..M6 MA22 RGLR:
TiN Shower Plate
TiN Shower Block"
*Missing Parts - Please inspect

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.