Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

KLA-Tencor Corp. Surfscan SP2

Asset ID: 79192

Print spec sheet

KLA-Tencor Corp.

Surfscan SP2

Particle Measurement

Metrology Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: BAREINSP


Tool config is based on original PO, please verify tool details at tool inspection


STANDARD SPECIFICATIONS

Windows System: Windows XP SP3

Main S/W: NGS 5.4 SR3 HF3

Wafer Size: 300mm SEMI Notch


Carrier

-3 AdvanTag SW CID, Phx, TDK (load port)

-8 user-configurable LEDs to display the loadport status

- Load/unload button for manual delivery hand-off

- Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host.


Facilities

-Power: 208 VAC, 3W-N

-CDA: > 28.3 Nl/min, > 6.6791 kg/cm2

-Vac: > 28.317 l/min, > -700 mm Hg


Chamber

-Powder Coat Panels Kit

-200/300mm Vacuum option

-Optical Filter


Load port: Vacuum 300mm Dual FIMS


Application

-2mm Edge Exclusion

-Oblique Incidence Illumination (High / Standard / Low)

-Normal Incidence Illumination (High / Standard / Low)

-Enhanced XY Coordinates

-IDM SP2

-Standard Classification package

-LPD-N Classification

-LPD-ES classification

-Grading and Sorting

-Spatial Filter (20 degree)

-Spatial Filter (40 degree)

-Spatial filter (rough films)

-Spatial filter (Back)

-High Sensitivity Inspect Mode

-High Throughput Inspect Mode


Options

-Haze

-Haze Normalization

-Haze Analysis

-IC/OEM Mfg Surf Quality Recipe


Wafer size: 300mm XY Calibration Wafer with first Article


HARDWARE CONFIGURATION

Others: 5 Color Light Tower (RBYGW)

Ethernet

-NFS Client

-E84 enabled for OHT & AGV/RGV

-E87 (Based on E39)

-GEM/SECS and HSMS

-E40/ E94/ E90 / E116


Handler: Secondary UI, Phoenix, SP2


Main Computer

-Intel®Xeon™ CPU 3.20GHz

-3.5 GB RAM Memory

-DVD- ROM

-Mouse

-Keyboard

-3.5" Floppy

-NGS application software


FEC computer

-Intel®Pentium®4 CPU

-248MB RAM Memory


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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