KLA-Tencor Corp. Surfscan SP2

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

RDA 11-3KLA_SP2_BAREINSP_01S2 KLAT SP2 BAREINSP

Tool config is based on original PO, please verify tool details at tool inspection

STANDARD SPECIFICATIONS

Windows System: Windows XP SP3

Main S/W: NGS 5.4 SR3 HF3

Wafer Size: 300mm SEMI Notch

Carrier

-3 AdvanTag SW CID, Phx, TDK (load port)

-8 user-configurable LEDs to display the loadport status

- Load/unload button for manual delivery hand-off

- Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host.

Facilities

-Power: 208 VAC, 3W-N

-CDA: > 28.3 Nl/min, > 6.6791 kg/cm2

-Vac: > 28.317 l/min, > -700 mm Hg

Chamber

-Powder Coat Panels Kit

-200/300mm Vacuum option

-Optical Filter

Load port: Vacuum 300mm Dual FIMS

Application

-2mm Edge Exclusion

-Oblique Incidence Illumination (High / Standard / Low)

-Normal Incidence Illumination (High / Standard / Low)

-Enhanced XY Coordinates

-IDM SP2

-Standard Classification package

-LPD-N Classification

-LPD-ES classification

-Grading and Sorting

-Spatial Filter (20 degree)

-Spatial Filter (40 degree)

-Spatial filter (rough films)

-Spatial filter (Back)

-High Sensitivity Inspect Mode

-High Throughput Inspect Mode

Options

-Haze

-Haze Normalization

-Haze Analysis

-IC/OEM Mfg Surf Quality Recipe

Wafer size: 300mm XY Calibration Wafer with first Article

HARDWARE CONFIGURATION

Others: 5 Color Light Tower (RBYGW)

Ethernet

-NFS Client

-E84 enabled for OHT & AGV/RGV

-E87 (Based on E39)

-GEM/SECS and HSMS

-E40/ E94/ E90 / E116

Handler: Secondary UI, Phoenix, SP2

Main Computer

-Intel®Xeon™ CPU 3.20GHz

-3.5 GB RAM Memory

-DVD- ROM

-Mouse

-Keyboard

-3.5" Floppy

-NGS application software

FEC computer

-Intel®Pentium®4 CPU

-1.99 GB RAM Memory

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales