Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Centris SYM3 Metal

Asset ID: 211201

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Applied Materials (AMAT)

Centris SYM3 Metal

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2019

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: CNTSYM3

Software Version: B2.8_255

System Power Rating: 208 AC 3-Phase

Loading Configuration: 4 load ports


Chamber A1:CNTSYM3; Chamber Chemicals Gases Used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2

Chamber A2:CNTSYM3; Chamber Chemicals Gases Used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2

Chamber B1:CNTSYM3; Chamber Chemicals Gases Used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2

Chamber B2:CNTSYM3; Chamber Chemicals Gases Used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2

Chamber C1:CNTSYM3; Chamber Chemicals Gases Used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2

Chamber C2:CNTSYM3; Chamber Chemicals Gases Used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2


Optional Gas

#1: MFC ready

#2: MFC ready

#3: Cl2, 400sccm

#4: MFC ready

#5: HBr, 400sccm

#6: SiCl4, 120sccm

#7: SF6, 100sccm

#8: O2, 60sccm

#9: BCl3, 300sccm

#10: CH2F2, 40sccm

#11: SO2, 200sccm

#12: MFC ready

#13: MFC ready

#14: NF3, 500ccm

#15: CHF3, 300sccm

#16: CF4, 300sccm

#17: He, 500sccm

#18: O2, 700sccm

#19: Ar, 1000sccm

#20: N2, 50sccm


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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