Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: December 25, 2013
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
|Software Version (include revision #)||AMS 2.8_82|
|System Power Rating||208VAC 3-Phase|
|Loading Configuration||2 Carrier Stage|
|Vendor Chm Model|
|Chm/Unit Position 1||Centura G5||'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43|
|Chm/Unit Position 2||Centura G5||'BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43|
|Chm/Unit Position 3||Centura Asp||CF4/O2/N2|
|Chm/Unit Position 4||Centura Asp||CF4/O2/N2|
Tool has been de-installed and is stored in an off-site warehouse.
Shipping kits have been installed a FI unit only. The shipping kits are required to be shipped back to Fab15.
Missing or damaged parts:
Qty 3 of SINGLE RING QUARTZ .50 HEIGHT 300MM HTD ESC (Consumable items) are missing.
No other missing or damaged parts. Fab15 confirmed it.
Tool is configured with endpoint.
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