Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
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Centura AP AdvantEdge G5 Metal
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: December 25, 2013
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Software Version (include revision #) AMS 2.8_82
System Power Rating 208VAC 3-Phase
Loading Configuration 2 Carrier Stage
Vendor Chm Model
Chm/Unit Position 1 Centura G5 BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position 2 Centura G5 BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43
Chm/Unit Position 3 Centura Asp CF4/O2/N2
Chm/Unit Position 4 Centura Asp CF4/O2/N2
Tool has been de-installed and is stored in an off-site warehouse.
Shipping kits have been installed a FI unit only.
The shipping kits are required to be shipped back to Fab15.
Missing or damaged parts:
Qty 3 of SINGLE RING QUARTZ .50 HEIGHT 300MM HTD ESC (Consumable items) are missing.
Please inspect to confirm any other missing or damaged parts.
Tool is configured with endpoint.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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