Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC



The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.

Asset ID: 204528

Enquire about this product Print spec sheet



Implant Dosing Measurement

Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available


Inspect to confirm configuration and condition.

The tool is running .

Configuration :

Install date : 2013/08/20

Last PM date : 2015/07/22

System SW(OS) version is Win 7

System SW(App) version is Release 1.5 Patch 11

All the cables are present

Wafer Handler :

Handler Type is Brooks and Cassette/FOUP Loaders are two

Robot Type is Brooks and include the Pre-Aligner

Communication Interface is GEM HosT 5050

Supporting Equipment :

Power Supply is 208V single phase(3write), 57~63hz, 13.5~15A

Backing Pump is Edward-IH80*2ea

Facility Requirements :

CDA : 6~7bar

Vacuum : Lower than 200mbar absolute 18splm

Gas : Ar 90% +/-1%

CH4 3bar

Power : 208V single phase(3write), 57~63hz, 13.5~15A

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.