Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: 2006-06
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 10/21/2022
| OEM | CANON | ||
| Tool Model | FPA-5500iZa | ||
| Process | Photo i-Line | ||
| Software Version (include revision #) | V72.05A.14 | ||
| System Power Rating | 200 AC 3-Phase for System | ||
| Loading Configuration | 1 FOUP load part and 2 SMIF indexer | ||
| Description | |||
| Tool: | |||
| Process Unit: Lamp house, Illumination system, Reticle stage, Projection lens, Wafer stage | Model: N/A | ||
| Controller: Main Console | |||
| MFC/Pressure Unit: Control Rack | |||
| Drive Mechanisms: Wafer feeder and Reticle Handler | |||
| FOUP Opener: Open cassette elevator | |||
| Gas System: CDA | |||
| Exhuast System: heat Exhaust | |||
| Safety: |
| Interlock |
| EMO |
| Lock out/Tag out |
| Other: | |
| PPC | |
| PC Remote Consoles(need application) |
Fab15 confirmed there were no missing or damaged parts.
Latest Lens performance data available: Please contact your sales person.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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