Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.
Date of Manufacture:
Currently Configured for: To be determined
Current Equipment Status: Available
Location of Equipment: Richardson, United States
Available date: Currently Available
In production until January 30, 2021.
The HL-800D system has the following features for high-speed and accuracy:
(1) a maximum beam size of 5 micrometers square with a current density of 10 A/cm2 at 50 kV acceleration;
(2) a high- speed and high-accuracy, three-stage electron-beam deflection-control system; and
(3) a continuous writing method to help eliminate stage-overhead time. The throughput of this system typically exceeds ten to fifteen wafers per hour for a quarter-micron pattern, though the speed depends on the total number of shots per wafer.
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