Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards iH1800SC

Asset ID: 209429

Print spec sheet

Edwards

iH1800SC

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 3- Not overhaul (pump controller is not included)


AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FSIH1800SCN3D52BE031400106266185A21.5-4.5FAB B
FSIH1800SCN3A52BE03420046290919FABB_F1FABB_F1
FSIH1800SCN3A52BE03460046296262FABB_F1FABB_F1



Technical data :

Mass (excluding packaging) : 502 kg

Vibration level at inlet : <1.8 mm s-1

Typical peak pumping speed : 1800 m3 h-1

Ultimate (shaft seal purge only) : 1x10-3 mbar

Inlet/Outlet Connection : ISO160 / NW40

Extraction port : 50 mm dia

Minimum cooling water flow rate required : 4 l min-1

Noise dB (A) : <69

Dimensions (L ( to exhaust enclosure) x W x H (to inverter))* : 986 (1059) x 470 x 888 (1094) mm

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