Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards iH1000

Asset ID: 209425

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Edwards

iH1000

Dry Pump

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty 9- Not overhaul (pump controller is not included)


AreaAsset descriptionoverhaulFixed Asset No.S/NLocationFAB
FSIH1000N3D52BE024100996364341A6.5-12FAB B
FS1000-328N3A52BE04460046362384A15-10.5FAB B
FS1000-328N3A52BE02B60037918951A21.5-4.5FAB B
FSIH1000N3A52BE02H10066166011FABB_F1FABB_F1
FSIH1000N3B52BE02030066306986FABB_F1FABB_F1
FSIH1000N3B52BE02480066318359FABB_F1FABB_F1
FSIH1000N3A52BE02E900046-335-178A23-3FAB B
FS1000-328N3A52BE02E50046304963A18.5-10FAB C
FSIH1000N3A52BE044700046-362-378A18.5-9.5FAB C


Technical data

60 Hz Peak speed (m3 /h) : 1000

60 Hz Ultimate vacuum (torr) : 7.5 x 10-4

50 Hz Peak speed (m3 /h) : 950

50 Hz Ultimate pressure (torr) : 1.5 x 10-3

Typical shaft seal nitrogen flow (slm) : 4

Cooling typical water flow at 15psi drop: 4 l/mn

Inlet connection : ISO100

Outlet connection : NW40

Weight : 430 kg

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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